文献
J-GLOBAL ID:200902274952095379
整理番号:06A1033713
いろいろな基板ホルダ形状でのマイクロ波放電における単結晶ダイヤモンドの実験的に得た成長率と形態のプラズマ及び気体動力学の数値予測との定性的一致
Qualitative Correspondences of Experimentally Obtained Growth Rates and Morphology of Single-Crystal Diamond with Numerical Predictions of Plasma and Gas Dynamics in Microwave Discharges for Various Substrate Holder Shapes
著者 (7件):
YAMADA Hideaki
(National Inst. of Advanced Industrial Sci. and Technol. (AIST), Osaka, JPN)
,
CHAYAHARA Akiyoshi
(National Inst. of Advanced Industrial Sci. and Technol. (AIST), Osaka, JPN)
,
MOKUNO Yoshiaki
(National Inst. of Advanced Industrial Sci. and Technol. (AIST), Osaka, JPN)
,
SODA Yousuke
(National Inst. of Advanced Industrial Sci. and Technol. (AIST), Osaka, JPN)
,
HORINO Yuji
(National Inst. of Advanced Industrial Sci. and Technol. (AIST), Osaka, JPN)
,
SHIKATA Shin-ichi
(National Inst. of Advanced Industrial Sci. and Technol. (AIST), Osaka, JPN)
,
FUJIMORI Naoji
(National Inst. of Advanced Industrial Sci. and Technol. (AIST), Osaka, JPN)
資料名:
Japanese Journal of Applied Physics. Part 1. Regular Papers, Short Notes & Review Papers
(Japanese Journal of Applied Physics. Part 1. Regular Papers, Short Notes & Review Papers)
巻:
45
号:
10B
ページ:
8177-8182
発行年:
2006年10月30日
JST資料番号:
G0520B
ISSN:
0021-4922
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
日本 (JPN)
言語:
英語 (EN)