文献
J-GLOBAL ID:200902281027347925
整理番号:09A0822142
ナノスケールの四点プローブ抵抗測定によって直接検出したダマシン銅ワイヤにおける結晶粒散乱
Direct detection of grain boundary scattering in damascene Cu wires by nanoscale four-point probe resistance measurements
著者 (6件):
KITAOKA Yusuke
(Dep. of Physics, School of Sci., Univ. of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-0033, JPN)
,
TONO Takeshi
(Dep. of Physics, School of Sci., Univ. of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-0033, JPN)
,
YOSHIMOTO Shinya
(Dep. of Physics, School of Sci., Univ. of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-0033, JPN)
,
HIRAHARA Toru
(Dep. of Physics, School of Sci., Univ. of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-0033, JPN)
,
HASEGAWA Shuji
(Dep. of Physics, School of Sci., Univ. of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-0033, JPN)
,
OHBA Takayuki
(School of Engineering, Univ. of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-0033, JPN)
資料名:
Applied Physics Letters
(Applied Physics Letters)
巻:
95
号:
5
ページ:
052110
発行年:
2009年08月03日
JST資料番号:
H0613A
ISSN:
0003-6951
CODEN:
APPLAB
資料種別:
逐次刊行物 (A)
記事区分:
短報
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)