文献
J-GLOBAL ID:200902296677755421
整理番号:05A0995524
マイクロ波プラズマCVDによる高速度ホモエピタクシャル成長の反復による単結晶ダイヤモンド合成
Synthesizing single-crystal diamond by repetition of high rate homoepitaxial growth by microwave plasma CVD
著者 (5件):
MOKUNO Y.
(Diamond Res. Center, National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-8-31 Midorigaoka, Ikeda ...)
,
CHAYAHARA A.
(Diamond Res. Center, National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-8-31 Midorigaoka, Ikeda ...)
,
SODA Y.
(Diamond Res. Center, National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-8-31 Midorigaoka, Ikeda ...)
,
HORINO Y.
(Diamond Res. Center, National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-8-31 Midorigaoka, Ikeda ...)
,
FUJIMORI N.
(Diamond Res. Center, National Inst. of Advanced Industrial Sci. and Technol. (AIST), 1-8-31 Midorigaoka, Ikeda ...)
資料名:
Diamond and Related Materials
(Diamond and Related Materials)
巻:
14
号:
11-12
ページ:
1743-1746
発行年:
2005年11月
JST資料番号:
W0498A
ISSN:
0925-9635
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)