文献
J-GLOBAL ID:201102269526737740
整理番号:11A1681968
SiO2基板上のInGaZnO4のエキシマレーザ結晶化
Excimer laser crystallization of InGaZnO4 on SiO2 substrate
著者 (11件):
CHEN Tao
(Delft Univ. of Technol., Lab. of Electronic Components, Technol. and Materials (ECTM), Delft Inst. of Microsystems ...)
,
WU Meng-Yue
(Delft Univ. of Technol., Lab. of Electronic Components, Technol. and Materials (ECTM), Delft Inst. of Microsystems ...)
,
WU Meng-Yue
(Delft Univ. of Technol., Kavli Inst. of Nanoscience, Lorentzweg 1, 2628 CJ, Delft, NLD)
,
ISHIHARA Ryoichi
(Delft Univ. of Technol., Lab. of Electronic Components, Technol. and Materials (ECTM), Delft Inst. of Microsystems ...)
,
NOMURA Kenji
(Delft Univ. of Technol., Lab. of Electronic Components, Technol. and Materials (ECTM), Delft Inst. of Microsystems ...)
,
NOMURA Kenji
(Tokyo Inst. of Technol., Materials and Structures Lab., 4259 Nagatsuta, Midori, 226-8503, Yokohama, JPN)
,
KAMIYA Toshio
(Delft Univ. of Technol., Lab. of Electronic Components, Technol. and Materials (ECTM), Delft Inst. of Microsystems ...)
,
KAMIYA Toshio
(Tokyo Inst. of Technol., Materials and Structures Lab., 4259 Nagatsuta, Midori, 226-8503, Yokohama, JPN)
,
HOSONO Hideo
(Delft Univ. of Technol., Lab. of Electronic Components, Technol. and Materials (ECTM), Delft Inst. of Microsystems ...)
,
HOSONO Hideo
(Tokyo Inst. of Technol., Materials and Structures Lab., 4259 Nagatsuta, Midori, 226-8503, Yokohama, JPN)
,
M BEENAKKER C. I.
(Delft Univ. of Technol., Lab. of Electronic Components, Technol. and Materials (ECTM), Delft Inst. of Microsystems ...)
資料名:
Journal of Materials Science. Materials in Electronics
(Journal of Materials Science. Materials in Electronics)
巻:
22
号:
11
ページ:
1694-1696
発行年:
2011年11月
JST資料番号:
W0003A
ISSN:
0957-4522
CODEN:
JMTSAS
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)