文献
J-GLOBAL ID:201102292167491465
整理番号:11A1617976
InGaO3’(ZnO)5バッファ層上への(111)配向Si膜の固相エピタキシャル成長
Solid-phase epitaxial growth of (111)-oriented Si film on InGaO3(ZnO)5 buffer layer
著者 (9件):
CHEN Tao
(Delft Univ. of Technol., Delft Inst. of Microsystems and Nanoelectronics Technol. (DIMES), Lab. of Electronic ...)
,
WU Meng-Yue
(Delft Univ. of Technol., Kavli Inst. of Nanoscience, Lorentzweg 1, 2628 CJ, Delft, NLD)
,
ISHIHARA Ryoichi
(Delft Univ. of Technol., Delft Inst. of Microsystems and Nanoelectronics Technol. (DIMES), Lab. of Electronic ...)
,
NOMURA Kenji
(Tokyo Inst. of Technol., Materials and Structures Lab., 4259 Nagatsuta, 226-8503, Midori, Yokohama, JPN)
,
NOMURA Kenji
(Tokyo Inst. of Technol., Frontier Res. Center, 4259 Nagatsuta, 226-8503, Midori, Yokohama, JPN)
,
KAMIYA Toshio
(Tokyo Inst. of Technol., Materials and Structures Lab., 4259 Nagatsuta, 226-8503, Midori, Yokohama, JPN)
,
HOSONO Hideo
(Tokyo Inst. of Technol., Materials and Structures Lab., 4259 Nagatsuta, 226-8503, Midori, Yokohama, JPN)
,
HOSONO Hideo
(Tokyo Inst. of Technol., Frontier Res. Center, 4259 Nagatsuta, 226-8503, Midori, Yokohama, JPN)
,
BEENAKKER C. I. M.
(Delft Univ. of Technol., Delft Inst. of Microsystems and Nanoelectronics Technol. (DIMES), Lab. of Electronic ...)
資料名:
Journal of Materials Science. Materials in Electronics
(Journal of Materials Science. Materials in Electronics)
巻:
22
号:
8
ページ:
920-923
発行年:
2011年08月
JST資料番号:
W0003A
ISSN:
0957-4522
CODEN:
JMTSAS
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)