文献
J-GLOBAL ID:201402262110918018
整理番号:14A1378559
新規のSn前駆体を用いて原子層堆積により成長させたSnO2薄膜
SnO2 thin films grown by atomic layer deposition using a novel Sn precursor
著者 (21件):
CHOI Min-jung
(Electronic Materials Res. Center, Korea Inst. of Sci. and Technol., Seoul, 136-791, KOR)
,
CHOI Min-jung
(Dep. of Materials Sci. and Engineering, Yonsei Univ., Seoul, 120-749, KOR)
,
CHO Cheol Jin
(Electronic Materials Res. Center, Korea Inst. of Sci. and Technol., Seoul, 136-791, KOR)
,
CHO Cheol Jin
(Dep. of Materials Sci. and Engineering, Seoul National Univ., Seoul, 151-744, KOR)
,
KIM Kwang-chon
(Electronic Materials Res. Center, Korea Inst. of Sci. and Technol., Seoul, 136-791, KOR)
,
PYEON Jung Joon
(Electronic Materials Res. Center, Korea Inst. of Sci. and Technol., Seoul, 136-791, KOR)
,
PARK Hyung-ho
(Dep. of Materials Sci. and Engineering, Yonsei Univ., Seoul, 120-749, KOR)
,
KIM Hyo-suk
(Div. of Advanced Materials, Korea Res. Inst. of Chemical Technol. (KRICT), Daejeon, 305-600, KOR)
,
HAN Jeong Hwan
(Div. of Advanced Materials, Korea Res. Inst. of Chemical Technol. (KRICT), Daejeon, 305-600, KOR)
,
KIM Chang Gyoun
(Div. of Advanced Materials, Korea Res. Inst. of Chemical Technol. (KRICT), Daejeon, 305-600, KOR)
,
CHUNG Taek-mo
(Div. of Advanced Materials, Korea Res. Inst. of Chemical Technol. (KRICT), Daejeon, 305-600, KOR)
,
PARK Tae Joo
(Dep. of Materials Sci. & Engineering, Hanyang Univ., Ansan, 426-791, KOR)
,
KWON Beomjin
(Electronic Materials Res. Center, Korea Inst. of Sci. and Technol., Seoul, 136-791, KOR)
,
JEONG Doo Seok
(Electronic Materials Res. Center, Korea Inst. of Sci. and Technol., Seoul, 136-791, KOR)
,
JEONG Doo Seok
(Dep. of Nanomaterials, Korea Univ. of Sci. and Technol., Daejeon, 305-333, KOR)
,
BAEK Seung-hyub
(Electronic Materials Res. Center, Korea Inst. of Sci. and Technol., Seoul, 136-791, KOR)
,
BAEK Seung-hyub
(Dep. of Nanomaterials, Korea Univ. of Sci. and Technol., Daejeon, 305-333, KOR)
,
KANG Chong-yun
(Electronic Materials Res. Center, Korea Inst. of Sci. and Technol., Seoul, 136-791, KOR)
,
KIM Jin-sang
(Electronic Materials Res. Center, Korea Inst. of Sci. and Technol., Seoul, 136-791, KOR)
,
KIM Seong Keun
(Electronic Materials Res. Center, Korea Inst. of Sci. and Technol., Seoul, 136-791, KOR)
,
KIM Seong Keun
(Dep. of Nanomaterials, Korea Univ. of Sci. and Technol., Daejeon, 305-333, KOR)
資料名:
Applied Surface Science
(Applied Surface Science)
巻:
320
ページ:
188-194
発行年:
2014年11月30日
JST資料番号:
B0707B
ISSN:
0169-4332
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)