文献
J-GLOBAL ID:201502202037583776
整理番号:15A0984242
ヒ素とホウ素を大量にドープしたSi表面に対するエピタキシャルチャネル品質の改善とトンネル電界効果トランジスタの性能への影響
Improvement of epitaxial channel quality on heavily arsenic- and boron-doped Si surfaces and impact on performance of tunnel field-effect transistors
著者 (11件):
MORITA Yukinori
(National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN)
,
MORI Takahiro
(National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN)
,
MIGITA Shinji
(National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN)
,
MIZUBAYASHI Wataru
(National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN)
,
FUKUDA Koichi
(National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN)
,
MATSUKAWA Takashi
(National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN)
,
ENDO Kazuhiko
(National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN)
,
O’UCHI Shin-ichi
(National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN)
,
LIU Yongxun
(National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN)
,
MASAHARA Meishoku
(National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN)
,
OTA Hiroyuki
(National Inst. of Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN)
資料名:
Solid-State Electronics
(Solid-State Electronics)
巻:
113
ページ:
173-178
発行年:
2015年11月
JST資料番号:
H0225A
ISSN:
0038-1101
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)