文献
J-GLOBAL ID:201702230590779057
整理番号:17A0118320
全360°測定範囲で維持された高感度を有するMEMS共振傾斜センサ【Powered by NICT】
A MEMS resonant tilt sensor with high sensitivity maintained in the whole 360° measurement range
著者 (6件):
Wang Shudong
(State Key Laboratory for Manufacturing Systems Engineering, Xi’An Jiaotong University, Xi’An, China)
,
Ren Juan
(State Key Laboratory for Manufacturing Systems Engineering, Xi’An Jiaotong University, Xi’An, China)
,
Zhang Tianyi
(State Key Laboratory for Manufacturing Systems Engineering, Xi’An Jiaotong University, Xi’An, China)
,
Weng Yinsheng
(State Key Laboratory for Manufacturing Systems Engineering, Xi’An Jiaotong University, Xi’An, China)
,
Jiang Zhuangde
(State Key Laboratory for Manufacturing Systems Engineering, Xi’An Jiaotong University, Xi’An, China)
,
Wei Xueyong
(State Key Laboratory for Manufacturing Systems Engineering, Xi’An Jiaotong University, Xi’An, China)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2016
号:
SENSORS
ページ:
1-3
発行年:
2016年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)