文献
J-GLOBAL ID:201702231995367734
整理番号:17A0364013
平面ピエゾ抵抗振動センサの事例研究:過渡時間履歴信号波の測定【Powered by NICT】
Case studies of a planar piezoresistive vibration sensor: Measuring transient time history signal waves
著者 (5件):
Zhang Lan
(Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8564, Japan)
,
Lu Jian
(Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8564, Japan)
,
Kurashima Yuichi
(Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8564, Japan)
,
Takagi Hideki
(Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8564, Japan)
,
Maeda Ryutaro
(Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8564, Japan)
資料名:
Microelectronic Engineering
(Microelectronic Engineering)
巻:
165
ページ:
27-31
発行年:
2016年
JST資料番号:
C0406B
ISSN:
0167-9317
CODEN:
MIENEF
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)