文献
J-GLOBAL ID:201702239589411312
整理番号:17A1465154
熱アシスト(400°C)Siシードパルスレーザアニーリングによる大単結晶Ge【Powered by NICT】
Large single-crystal Ge-on-insulator by thermally-assisted (400°C) Si-seeded-pulse-laser annealing
著者 (5件):
Sadoh T.
(Department of Electronics, Kyushu University, 744 Motooka, Fukuoka 819-0395, Japan)
,
Kurosawa M.
(Department of Electronics, Kyushu University, 744 Motooka, Fukuoka 819-0395, Japan)
,
Heya A.
(Department of Materials and Synchrotron Radiation Engineering, University of Hyogo, 2167 Shosha, Himeji, Hyogo 671-2280, Japan)
,
Matsuo N.
(Department of Materials and Synchrotron Radiation Engineering, University of Hyogo, 2167 Shosha, Himeji, Hyogo 671-2280, Japan)
,
Miyao M.
(Department of Electronics, Kyushu University, 744 Motooka, Fukuoka 819-0395, Japan)
資料名:
Materials Science in Semiconductor Processing
(Materials Science in Semiconductor Processing)
巻:
70
ページ:
8-11
発行年:
2017年
JST資料番号:
W1055A
ISSN:
1369-8001
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)