文献
J-GLOBAL ID:201702273344482706
整理番号:17A1381682
法線ベクトル追跡法に基づくnanoprofilerによる高精度三次元非球面ミラー測定【Powered by NICT】
High-accuracy three-dimensional aspheric mirror measurement with nanoprofiler based on normal vector tracing method
著者 (7件):
Kudo Ryota
(Research Center for Ultra-Precision Science and Technology, Osaka University, 2-1 Yamada-oka, Suita Osaka, 565-0871, Japan)
,
Kitayama Takao
(Research Center for Ultra-Precision Science and Technology, Osaka University, 2-1 Yamada-oka, Suita Osaka, 565-0871, Japan)
,
Tokuta Yusuke
(Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita Osaka, 565-0871, Japan)
,
Shiraji Hiroki
(Research Center for Ultra-Precision Science and Technology, Osaka University, 2-1 Yamada-oka, Suita Osaka, 565-0871, Japan)
,
Nakano Motohiro
(Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita Osaka, 565-0871, Japan)
,
Yamamura Kazuya
(Research Center for Ultra-Precision Science and Technology, Osaka University, 2-1 Yamada-oka, Suita Osaka, 565-0871, Japan)
,
Endo Katsuyoshi
(Research Center for Ultra-Precision Science and Technology, Osaka University, 2-1 Yamada-oka, Suita Osaka, 565-0871, Japan)
資料名:
Optics and Lasers in Engineering
(Optics and Lasers in Engineering)
巻:
98
ページ:
159-162
発行年:
2017年
JST資料番号:
A0602B
ISSN:
0143-8166
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)