文献
J-GLOBAL ID:201802219712706431
整理番号:18A1488431
センシング応用のためのAuナノドットによる原子層堆積と表面官能化による超薄TiO_2膜【JST・京大機械翻訳】
Ultra-thin TiO2 films by atomic layer deposition and surface functionalization with Au nanodots for sensing applications
著者 (13件):
Lupan Oleg
(Institute for Materials Science, Faculty of Engineering, Chair for Functional Nanomaterials, Kiel University, Kaiserstr. 2, D-24143 Kiel, Germany)
,
Lupan Oleg
(Department of Microelectronics and Biomedical Engineering, Technical University of Moldova, 168 Stefan cel Mare Av., MD-2004 Chisinau, Republic of Moldova)
,
Postica Vasile
(Department of Microelectronics and Biomedical Engineering, Technical University of Moldova, 168 Stefan cel Mare Av., MD-2004 Chisinau, Republic of Moldova)
,
Ababii Nicolai
(Department of Microelectronics and Biomedical Engineering, Technical University of Moldova, 168 Stefan cel Mare Av., MD-2004 Chisinau, Republic of Moldova)
,
Reimer Tim
(Fraunhofer Institute for Silicon Technologies, (ISIT), Fraunhoferstr. 1, D-25524 Itzehoe, Germany)
,
Reimer Tim
(Institute of Electrical Engineering and Information Technology, Faculty of Engineering, Kiel University, Kaiserstr. 2, D-24143 Kiel, Germany)
,
Shree Sindu
(Institute for Materials Science, Faculty of Engineering, Chair for Functional Nanomaterials, Kiel University, Kaiserstr. 2, D-24143 Kiel, Germany)
,
Hoppe Mathias
(Institute for Materials Science, Faculty of Engineering, Chair for Functional Nanomaterials, Kiel University, Kaiserstr. 2, D-24143 Kiel, Germany)
,
Polonskyi Oleksandr
(Chair for Multicomponent Materials, Institute for Materials Science, Faculty of Engineering, Kiel University, Kaiserstr. 2, D-24143 Kiel, Germany)
,
Sontea Victor
(Department of Microelectronics and Biomedical Engineering, Technical University of Moldova, 168 Stefan cel Mare Av., MD-2004 Chisinau, Republic of Moldova)
,
Chemnitz Steffen
(Institute of Electrical Engineering and Information Technology, Faculty of Engineering, Kiel University, Kaiserstr. 2, D-24143 Kiel, Germany)
,
Faupel Franz
(Chair for Multicomponent Materials, Institute for Materials Science, Faculty of Engineering, Kiel University, Kaiserstr. 2, D-24143 Kiel, Germany)
,
Adelung Rainer
(Institute for Materials Science, Faculty of Engineering, Chair for Functional Nanomaterials, Kiel University, Kaiserstr. 2, D-24143 Kiel, Germany)
資料名:
Materials Science in Semiconductor Processing
(Materials Science in Semiconductor Processing)
巻:
87
ページ:
44-53
発行年:
2018年
JST資料番号:
W1055A
ISSN:
1369-8001
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)