文献
J-GLOBAL ID:201802250826047742
整理番号:18A0017909
計測学的原子間力顕微鏡を用いた標準ナノ粒子のサイズ測定とその不確実性の評価【Powered by NICT】
Size measurements of standard nanoparticles using metrological atomic force microscope and evaluation of their uncertainties
著者 (5件):
Misumi Ichiko
(National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), Central 3 bldg., 1-1-1 Umezono, Tsukuba, Ibaraki 305-8563 Japan)
,
Sugawara Kentaro
(National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), Central 3 bldg., 1-1-1 Umezono, Tsukuba, Ibaraki 305-8563 Japan)
,
Takahata Keiji
(National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), Central 3 bldg., 1-1-1 Umezono, Tsukuba, Ibaraki 305-8563 Japan)
,
Takahashi Kayori
(National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), Central 3 bldg., 1-1-1 Umezono, Tsukuba, Ibaraki 305-8563 Japan)
,
Ehara Kensei
(National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), Central 3 bldg., 1-1-1 Umezono, Tsukuba, Ibaraki 305-8563 Japan)
資料名:
Precision Engineering
(Precision Engineering)
巻:
51
ページ:
691-701
発行年:
2018年
JST資料番号:
A0734B
ISSN:
0141-6359
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)