文献
J-GLOBAL ID:201802266203131278
整理番号:18A0850718
ハロゲン化物気相エピタクシーによるβ-Ga_2O_3層のホモエピタキシャル成長のための酸素源としてのO_2とH_2Oの比較【JST・京大機械翻訳】
Comparison of O2 and H2O as oxygen source for homoepitaxial growth of β-Ga2O3 layers by halide vapor phase epitaxy
著者 (17件):
Konishi Keita
(Department of Applied Chemistry, Tokyo University of Agriculture and Technology, 2-24-16 Naka-cho, Koganei, Tokyo 184-8588, Japan)
,
Goto Ken
(Tamura Corporation, 2-3-1 Hirosedai, Sayama, Saitama 350-1328, Japan)
,
Goto Ken
(Novel Crystal Technology, Inc., 2-3-1 Hirosedai, Sayama, Saitama 350-1328, Japan)
,
Goto Ken
(Department of Applied Chemistry, Tokyo University of Agriculture and Technology, 2-24-16 Naka-cho, Koganei, Tokyo 184-8588, Japan)
,
Togashi Rie
(Department of Applied Chemistry, Tokyo University of Agriculture and Technology, 2-24-16 Naka-cho, Koganei, Tokyo 184-8588, Japan)
,
Togashi Rie
(Institute of Global Innovation Research, Tokyo University of Agriculture and Technology, 2-24-16 Naka-cho, Koganei, Tokyo 184-8588 Japan)
,
Murakami Hisashi
(Department of Applied Chemistry, Tokyo University of Agriculture and Technology, 2-24-16 Naka-cho, Koganei, Tokyo 184-8588, Japan)
,
Murakami Hisashi
(Institute of Global Innovation Research, Tokyo University of Agriculture and Technology, 2-24-16 Naka-cho, Koganei, Tokyo 184-8588 Japan)
,
Higashiwaki Masataka
(National Institute of Information and Communications Technology, 4-2-1 Nukui-Kitamachi, Koganei, Tokyo 184-8795, Japan)
,
Kuramata Akito
(Tamura Corporation, 2-3-1 Hirosedai, Sayama, Saitama 350-1328, Japan)
,
Kuramata Akito
(Novel Crystal Technology, Inc., 2-3-1 Hirosedai, Sayama, Saitama 350-1328, Japan)
,
Yamakoshi Shigenobu
(Tamura Corporation, 2-3-1 Hirosedai, Sayama, Saitama 350-1328, Japan)
,
Yamakoshi Shigenobu
(Novel Crystal Technology, Inc., 2-3-1 Hirosedai, Sayama, Saitama 350-1328, Japan)
,
Monemar Bo
(Institute of Global Innovation Research, Tokyo University of Agriculture and Technology, 2-24-16 Naka-cho, Koganei, Tokyo 184-8588 Japan)
,
Monemar Bo
(Department of Physics, Chemistry and Biology (IFM), Linkoping University, SE-581 83 Linkoping, Sweden)
,
Kumagai Yoshinao
(Department of Applied Chemistry, Tokyo University of Agriculture and Technology, 2-24-16 Naka-cho, Koganei, Tokyo 184-8588, Japan)
,
Kumagai Yoshinao
(Institute of Global Innovation Research, Tokyo University of Agriculture and Technology, 2-24-16 Naka-cho, Koganei, Tokyo 184-8588 Japan)
資料名:
Journal of Crystal Growth
(Journal of Crystal Growth)
巻:
492
ページ:
39-44
発行年:
2018年
JST資料番号:
B0942A
ISSN:
0022-0248
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)