文献
J-GLOBAL ID:201802282176390612
整理番号:18A0618681
によるシリコンバイアを用いたプラットフォームLSIのクワッドのシーソー電極構造を用いた集積化3軸触覚センサ【Powered by NICT】
Integrated 3-axis tactile sensor using quad-seesaw-electrode structure on platform LSI with through silicon vias
著者 (10件):
Hata Yoshiyuki
(Toyota Central R&D Labs., Inc., 41-1, Yokomichi, Nagakute, Aichi 480-1192, Japan)
,
Suzuki Yukio
(Tohoku University, 6-6-01, Aramaki Aza Aoba, Aoba-ku, Sendai, Miyagi 980-8579, Japan)
,
Muroyama Masanori
(Tohoku University, 6-6-01, Aramaki Aza Aoba, Aoba-ku, Sendai, Miyagi 980-8579, Japan)
,
Nakayama Takahiro
(Toyota Motor Corporation, 543, Kirigahora, Nishi Hirose-cho, Toyota, Aichi 470-0309, Japan)
,
Nonomura Yutaka
(Toyota Central R&D Labs., Inc., 41-1, Yokomichi, Nagakute, Aichi 480-1192, Japan)
,
Chand Rakesh
(Tohoku University, 6-6-01, Aramaki Aza Aoba, Aoba-ku, Sendai, Miyagi 980-8579, Japan)
,
Hirano Hideki
(Tohoku University, 6-6-01, Aramaki Aza Aoba, Aoba-ku, Sendai, Miyagi 980-8579, Japan)
,
Omura Yoshiteru
(Toyota Central R&D Labs., Inc., 41-1, Yokomichi, Nagakute, Aichi 480-1192, Japan)
,
Fujiyoshi Motohiro
(Toyota Central R&D Labs., Inc., 41-1, Yokomichi, Nagakute, Aichi 480-1192, Japan)
,
Tanaka Shuji
(Tohoku University, 6-6-01, Aramaki Aza Aoba, Aoba-ku, Sendai, Miyagi 980-8579, Japan)
資料名:
Sensors and Actuators. A. Physical
(Sensors and Actuators. A. Physical)
巻:
273
ページ:
30-41
発行年:
2018年
JST資料番号:
B0345C
ISSN:
0924-4247
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)