文献
J-GLOBAL ID:201902227887436106
整理番号:19A0098697
イオン散乱分光法を用いたSi(001)上の自己集合白金-ケイ化物ナノ構造の構造解析
Structural Analysis of Self-Assembled Platinum-Silicide Nanostructures on Si(001) Using Ion Scattering Spectroscopy
著者 (6件):
Kagitani Hiroyuki
(Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University)
,
Kinoshita Seijiro
(Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University)
,
Kubo Osamu
(Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University)
,
Takahashi Kazuki
(Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University)
,
Tabata Hiroshi
(Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University)
,
Katayama Mitsuhiro
(Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University)
資料名:
e-Journal of Surface Science and Nanotechnology (Web)
(e-Journal of Surface Science and Nanotechnology (Web))
巻:
16
ページ:
66-71(J-STAGE)
発行年:
2018年
JST資料番号:
U0016A
ISSN:
1348-0391
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
日本 (JPN)
言語:
英語 (EN)