文献
J-GLOBAL ID:201902279620595526
整理番号:19A0235566
高分解能RBSとERDAを用いたソーダ石灰ケイ酸塩ガラスの高分解能深さプロファイリング【JST・京大機械翻訳】
High-resolution depth profiling of soda-lime silicate glass using high-resolution RBS and ERDA
著者 (5件):
Sakata Hiroki
(Department of Micro Engineering, Kyoto University, Kyoto 615-8540, Japan)
,
Yamamoto Yuichi
(Innovative Technology Research Center, ASAHI Glass Co., Ltd., Hazawa-cho, Kanagawa-ku, Yokohama 221-8755, Japan)
,
Sato Koya
(Department of Micro Engineering, Kyoto University, Kyoto 615-8540, Japan)
,
Nakajima Kaoru
(Department of Micro Engineering, Kyoto University, Kyoto 615-8540, Japan)
,
Kimura Kenji
(Department of Micro Engineering, Kyoto University, Kyoto 615-8540, Japan)
資料名:
Nuclear Instruments & Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms
(Nuclear Instruments & Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms)
巻:
440
ページ:
60-63
発行年:
2019年
JST資料番号:
H0899A
ISSN:
0168-583X
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)