文献
J-GLOBAL ID:202002215461128737
整理番号:20A1716351
接合品質を改善するためのPEDOT:PSS/n型Si界面における熱アニール原子層堆積AlO/化学トンネル酸化物スタック層の効果【JST・京大機械翻訳】
Effect of thermally annealed atomic-layer-deposited AlO/chemical tunnel oxide stack layer at the PEDOT:PSS/n-type Si interface to improve its junction quality
著者 (11件):
Karim Md Enamul
(Graduate School of Science and Engineering, Saitama University, Saitama 338-8570, Japan)
,
Nasuno Yuki
(Graduate School of Science and Engineering, Saitama University, Saitama 338-8570, Japan)
,
Kuddus Abdul
(Graduate School of Science and Engineering, Saitama University, Saitama 338-8570, Japan)
,
Ukai Tomofumi
(Bio-Nano Electronics Research Center, Toyo University, Kawagoe Saitama 335-8585, Japan)
,
Kurosu Shunji
(Bio-Nano Electronics Research Center, Toyo University, Kawagoe Saitama 335-8585, Japan)
,
Tokuda Masahide
(Bio-Nano Electronics Research Center, Toyo University, Kawagoe Saitama 335-8585, Japan)
,
Fujii Yasuhiko
(Bio-Nano Electronics Research Center, Toyo University, Kawagoe Saitama 335-8585, Japan)
,
Hanajiri Tatsuro
(Bio-Nano Electronics Research Center, Toyo University, Kawagoe Saitama 335-8585, Japan)
,
Ishikawa Ryo
(Graduate School of Science and Engineering, Saitama University, Saitama 338-8570, Japan)
,
Ueno Keiji
(Graduate School of Science and Engineering, Saitama University, Saitama 338-8570, Japan)
,
Shirai Hajime
(Graduate School of Science and Engineering, Saitama University, Saitama 338-8570, Japan)
資料名:
Journal of Applied Physics
(Journal of Applied Physics)
巻:
128
号:
4
ページ:
045305-045305-12
発行年:
2020年
JST資料番号:
C0266A
ISSN:
0021-8979
CODEN:
JAPIAU
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)