Rchr
J-GLOBAL ID：200901008578117619
Update date: May. 29, 2024
Takahashi Kazuo
タカハシ カズオ | Takahashi Kazuo
Affiliation and department：
Job title：
Associate Professor
Research field (3)：
Electric/electronic material engineering
, Basic plasma science
, Applied plasma science
Research keywords (2)：
プラズマ物性工学
, Plasma science and technology
Research theme for competitive and other funds (22)：
- 2012 - 2017 Measurements, Analyses and Control of Fine-Particle Plasmas
- 2012 - 2014 微粒子プラズマナノ界面における化学反応の解析と浮遊型熱センサの開発
- 2011 - 2012 Skeletal muscle cell activation by atmospheric plasma exposure and application to tissues
- 2010 - 2011 微粒子プラズマ中のナノ界面における熱ダイナミクスの解明
- 2008 - 2009 Analyses of chemical reaction producing carbonized-metal for ULSI plasma etching process
- 2007 - 2009 Critical Phenomena in Fine-Particle Plasma
- 2006 - 2007 次世代半導体デバイスのための遷移金属材料プラズマエッチングプロセスの開発
- 2006 - 2007 マイクロプラズマスラスタの研究開発:高温反応場と高速流れ場の競合現象の解明と制御
- 2004 - 2006 気相成長ナノ粒子直接照射による酸化物ナノコンポジット機能材の低温高速成膜法の開発
- 2005 - 2005 次世代半導体デバイスのための遷移金属材料プラズマエッチングプロセスの開発
- 2004 - 2005 マイクロプラズマスラスターの研究開発
- 2003 - 2005 Mechanism Investigations and Control of Phonon-Excitation Anneal Process for Ultra-Shallow Junction Formation
- 2002 - 2004 表面波励起プラズマを用いた超小型プラズマスラスターの研究開発
- 2002 - 2004 A Study of the Particle Transport and Surface Reactions in Microstructures on Substrates during Plasma Processing
- 2002 - 2003 コヒーレントフォノン励起による極浅半導体接合の低温活性化に関する基礎研究
- 2001 - 2003 Development of Plasma Technologies for Advanced Plasma-Based Ion Implantation Processes Using Internal-Antenna-Driven Large-Volume RF Plasma Sources
- 2002 - プロセシングプラズマにおける化学反応過程に関する研究
- 2002 - Study on Chemical Reactions in Processing Plasmas
- 1995 - ダストプラズマにおけるクーロン結晶に関する研究
- 1995 - Study on Coulomb Crystals in Dusty Plasmas
- プラズマを利用した材料プロセス
- material process using plasmas
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Papers (76)：
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Tomoyuki Nonaka, Kazuo Takahashi, Akimi Uchida, Stefan Lundgaard, Osamu Tsuji. Effects of C4F8 plasma polymerization film on etching profiles in the Bosch process. Journal of Vacuum Science & Technology A. 2023. 41. 6
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Kazuo Takahashi, Atsushi Yuri, Yosuke Sanada, Tomoya Ohara, Ryota Ukai. Inactivating gram-positive microorganism by using atmospheric pressure discharges with water mist. Japanese Journal of Applied Physics. 2023. 62. 1. 016003-016003
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Didar Batryshev, Almasbek Utegenov, Rakhymzhan Zhumadilov, Nazym Akhanova, Sagi Orazbayev, Sultan Ussenkhan, Jiashu Lin, Kazuo Takahashi, Nuriya Bastykova, Sandugash Kodanova, et al. Carbon nanoparticles characteristics synthesized in pulsed radiofrequency discharge and their effect on surface hydrophobicity. Contributions to Plasma Physics. 2022. 62. 10
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Yuhi Inada, Shusuke Yamashita, Shuya Murakami, Kazuo Takahashi, Takeshi Yamao, Shu Hotta. Direct fabrication of a diffraction grating onto organic oligomer crystals by focused ion beam lithography followed by plasma etching. Japanese Journal of Applied Physics. 2021. 60. 12. 120901-120901
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Kazuo Takahashi. Interaction between charged particles demonstrated in microgravity experiments of dusty plasmas. 2021
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MISC (8)：
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Itooka Koki, Takahashi Kazuo, Izawa Shingo. 3P-097 Sterilization effect of atmospheric pressure low temperature plasma on yeast cells and its mechanism analysis. 2015. 67. 295-295
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Totsuji H., Takahashi K., Adachi S., Tonouchi M., Totsuji C. Distribution of fine particles in cylindrical plasmas : Comparison between theory and simulations. Meeting abstracts of the Physical Society of Japan. 2013. 68. 2. 206-206
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ADACHI Satoshi, TOTSUJI Hiroo, TAKAHASHI Kazuo, HAYASHI Yasuaki, TAKAYANAGI Masahiro. International Collaboration on Complex Plasmas Research. JASMA. 2010. 27. 3. 137-142
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ADACHI Satoshi, TAKAYANAGI Masahiro, TOTSUJI Hiroo, HAYASHI Yasuaki, TAKAHASHI Kazuo. Current Status and Future Plans of Microgravity Experiments in Dusty Plasmas in JAXA. 2009. 26. 4. 350-350
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ONO Kouichi, TAKAHASHI Kazuo, ERIGUCHI Koji. Dry Etching Technology of High Dielectric Constant (High-k) Materials. Journal of plasma and fusion research. 2009. 85. 4. 185-192
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Patents (4)：
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プラズマを用いた微粒子配列装置及び微粒子配列方法
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マイクロアレイ用基板
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マイクロアレイ用基板の製造方法
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低誘電率多孔質膜の作成方法
Books (4)：
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Carbon clustering and diamond nucleation in fluorocarbon plasmas
New Vistas in Dusty Plasmas (AIP Conference Proceedings Vol. 799) (American Institute of Physics, New York) 2005
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Production mechanism and chemical structure of dust particles in fluorocarbon plasmas
Dusty Plasmas in the New Millennium (AIP Conference Proceedings Vol.649) (American Institute of Physics, New York) 2002
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Determination factor of Coulomb crystal structure in dusty plasmas
Frontiers in Dusty Plasmas (Elsevier, Amsterdam) 2000
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Structures of Coulomb crystals from growing particles in a plasma(共著)
Advances in Dusty Plasmas (World Scientific, Singapore) 1997
Lectures and oral presentations (7)：
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Physics of Dusty Plasmas and Its Applications - Coulomb Crystals, Inter-Particle Interaction and Microgravity Science -
(2024)
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Etching characteristics of GaN and role of hydrogen atoms in hydrogen plasmas
(International Symposium on Dry Process 2023 2023)
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Analyses of Coulomb Crystals in Dusty Plasmas under Gravity and Microgravity
(Global Plasma Forum 2023 2023)
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Properties of Passivation Films and Influences on Profile in the Bosch Process
(2023)
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Ion bombardment on microorganism in dusty plasmas
(International Conference on Phenomena in Ionized Gases (ICPIG) XXXV 2023)
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Education (6)：
Professional career (2)：
- Doctor of Engineering (Kyoto University)
- Master of Engineering (Kyoto Institute of Technology)
Work history (13)：
- 2015/04 - 現在 Kyoto Institute of Technology Faculty of Electrical Engineering and Electronics Associate Professor
- 2019/09 - 2019/09 フランス共和国オルレアン大学客員研究員
- 2019/04 - 2019/04 中華民国国立台湾科学技術大学客員教授
- 2018/12 - 2018/12 カザフスタン共和国アル-ファラビカザフ国立大学客員教授
- 2015/04 - 2015/10 Visiting Professor, University of Orleans
- 2007/04 - 2015/03 Kyoto Institute of Technology Department of Electronics Associate Professor
- 2006/04 - 2007/03 Kyoto Institute of Technology Department of Electronics Associate Professor
- 2005 - 2006 ドイツ連邦共和国マックスプランク研究所客員研究員
- 2005 - 2006 Visiting Scientist, Max-Planck-Institute fuer extraterrestrische Physik
- 2001 - 2006 Kyoto University Graduate School of Engineering, Department of Aeronautics and Astronautics
- 2001 - 2006 Research Associate, Dept. of Aeronautics and Astronautics, Kyoto University
- 2000 - 2001 日本学術振興会特別研究員
- 2000 - 2001 Research Fellow of the Japan Society for the Promotion of Science
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Committee career (15)：
- 2015 - 現在 European Space Agency PK-4 Facility Science Team Member
- 2021 - 2023/03 応用物理学会 プラズマエレクトロニクス分科会幹事
- 2015 - 2019 宇宙航空研究開発機構 宇宙環境利用専門委員会委員
- 2016 - 2018 応用物理学会関西支部 諮問委員
- 2012 - 2016 宇宙航空研究開発機構 大学共同利用システム研究員
- 2013 - 2015 応用物理学会関西支部 幹事
- 2013 - 2015 応用物理学会プラズマエレクトロニクス分科会 幹事
- 2012 - 2015 日本真空学会関西支部 役員
- 2013 - 2014 プラズマ・核融合学会 年会運営委員
- 2012 - 2014 プラズマ・核融合学会 編集委員
- 2011 - 2013 プラズマ・核融合学会 プログラム委員
- 2008 - 2012 宇宙航空研究開発機構 宇宙科学研究本部プロジェクト共同研究員
- 2003 - 2005 応用物理学会プラズマエレクトロニクス分科会 幹事
- 2003 - 2005 日本航空宇宙学会関西支部 幹事
- 2001 - 日本航空宇宙学会 関西支部幹事
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Awards (8)：
- 2005 - DPS (Dry Process Symposium) 2004 Award for Young Researcher
- 2005 - . 2005 International Symposium on Dry Process,DPS 2004 Award (Young Researcher Award)
- 2002 - DPS (Dry Process Symposium) 2001 Award for Young Researcher
- 2002 - 2002 International Symposium on Dry Process,DPS 2001 Award (Young Researcher Award)
- 1999 - 第24回熊谷記念真空科学論文賞
- 1998 - 51st Annual Gaseous Electronic Conference and 4th International Conference on Reactive Plasmas, GEC Student Award for Excellenc
- 1998 - 第4回応用物理学会講演奨励賞
- 1998 - 51st Annual Gaseous Electronic Conference and 4th International Conference on Reactive Plasmas, GEC Student Award for Excellence
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Association Membership(s) (4)：
American Vacuum Society
, 日本航空宇宙学会
, 日本真空協会
, 応用物理学会
