Kuwano Hiroki

クワノヒロキ | Kuwano Hiroki

Affiliation and department：
Job title： Professor
Homepage URL (1)： http://www.nanosys.mech.tohoku.ac.jp/

Research field (2)： Nano/micro-systems , Nanomaterials

Research keywords (6)：マイクロエネルギー , 情報ナノシステム , マイクロセンサ , MEMS , 医療・健康情報システム , 環境情報システム

Research theme for competitive and other funds (6)：

2021 - 2024 Study of multi focused ion beam using ion species generated from ion liquid
2016 - 2021 Development of multi-focused ion beams for highly functional nano-dimension free processing
2012 - 2014 Research of MEMS micro ion source using ion liquid
2005 - 2011 Research of nano-energy system creation
2007 - NMEMS(Nano-Micro Electromechanical Systems)の情報制御技術とネットワーク化の研究

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Papers (324)：

Le Van Minh, Hiroki Kuwano. Piezoelectric Tantalum Aluminum Nitride Films for Vibrational Micro Energy Harvesters. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2021. 2021-. 242-245
Nguyen Van Chinh, Le Van Minh, Takahito Ono, Hiroki Kuwano. Micromachined Multi-Ion Sources Integrated Micro-Fluidic Channels. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2021. 2021-January. 14-17
Hung Hoang Nguyen, Haruhiko Asanuma, Hiroyuki Oguchi, Gael Sebald, Hiroki Kuwano. Pb52(Zr,Ti)48O3 Ferroelectric Dipole Electret Exploiting Surface Pillar Array Structure for Electrostatic Vibration Energy Harvesters. Sensors and Materials. 2020. 32. 7. 2517-2517
Qiu Zheng, Le Van Minh, Hung Hoang Nguyen, Hiroki Kuwano. Mechanical fatigue analysis of AlN/SUS430/AlN heterolayered foils in micromachined devices. Sensors and Materials. 2020. 32. 7. 2463-2473
H. H. Nguyen, L. Van Minh, H. Kuwano. High-rate etching of single oriented AlN films by chlorine-based inductive coupled plasma for vibrational energy harvesters. Journal of Physics: Conference Series. 2019. 1407. 1

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MISC (86)：

Micro gyro sensors employing a single surface acoustic wave resonator. 2015. 32. 1-4
Nguyen Hoang Hung. 28pm3-F-2 Development of high performance AlN-based piezoelectric films. 2015. 2015. 7. "28pm3-F-2-1"-"28pm3-F-2-2"
Le Van Minh, Hara Motoaki, Yokoyama Tsuyoshi, Nishihara Tokihiro, Ueda Masanori, Kuwano Hiroki. 29pm3-PN-37 Cantilever based energy harvesters using Mg-Zr-codoped aluminum nitride with high piezoelectricity. 2015. 2015. 7. "29pm3-PN-37-1"-"29pm3-PN-37-2"
Sugimoto Shun, Hara Motoaki, Oguchi Hiroyuki, Kuwano Hiroki. 2E4-2 Directional Spraying Systems Employing Surface Acoustic Wave Resonators(Piezoelectric devices). Proceedings of Symposium on Ultrasonic Electronics. 2014. 35. 205-206
Aluminum nitride based surface acoustic wave strain sensors. 2014. 31. 1-4

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Patents (96)：

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Books (19)：

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Lectures and oral presentations (122)：

HIGHLY SENSITIVE STRAIN SENSORS USING SURFACE ACOUSTIC WAVE ON ALUMINUM NITRIDE THIN FILM FOR WIRELESS SENSOR NETWORKS
(IEEE Trancducers 2015 2015)
MICROFABRICATED ELECTROSTATIC PLANAR LENS ARRAY AND EXTRACTORS FOR MULTI-FOCUSED ION BEAM SYSTEM USING IONIC LIQUID ION SOURCE EMITTER ARRAY
(IEEE MEMS Conference 2015 2015)
Piezoelectric micro energy harvesters employing advanced (Mg,Zr)-codoped AlN thin film
(IEEE MEMS Conference 2015 2015)
MEMSは融合技術
(東北大学ベンチャービジネスラボラトリー開設20周年記念シンポジウム 2014)
A Si-Based Double Micro-Structure Electrode For High Capacity Electrical Double Layer Capacitors
(PowerMEMS 2014 2014)

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Education (2)：

Professional career (1)：

Work history (12)：

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Committee career (35)：

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Awards (8)：

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Association Membership(s) (5)：

IEEE , 精密工学会 , 電気学会 , 電子情報通信学会 , 日本機械学会

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