Khajornrungruang Panart

カチョーンルンルアンパナート | Khajornrungruang Panart

Affiliation and department：
Job title： Associate Professor

Research field (3)： Manufacturing and production engineering , Measurement engineering , Optical engineering and photonics

Research keywords (6)：化学的機械研磨 , ナノスケール可視化 , 光応用計測 , Chemical Mechanical Polishing , Visualization in Nanoscale , Optical Applied Measurement

Research theme for competitive and other funds (11)：

2021 - 2024 触媒活性型フラーレンナノ微粒子を用いた加工制御法に関する研究
2016 - 2019 Study on 3 Dimension Trajectory and Size Measurment of Each Operating Particle in Nano-Scale Processing Phenomena
2015 - 2018 Study on hybrid nano fine particles using fullerene hydroxide for hard to work materials
2001 - 2016 光回折による微小径工具の切れ刃位置のオンマシン計測
2013 - 2015 On-Machine Polishing Phenomena Observation Apparatus Development and Its Phenomenon Analysis

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Papers (80)：

Yutaka Terayama, Panart Khajornrungruang, Jihoon Seo, Satomi Hamada, Yutaka Wada, Hirokuni Hiyama. Detachment Energy Evaluation in Nano-Particle Cleaning Using Lateral Force Microscopy. Applied Sciences. 2024. 14. 18. 8145-8145
Thitipat Permpatdechakul, Panart Khajornrungruang, Keisuke Suzuki, Aran Blattler, Jiraphan Inthiam. Experimental In-Situ Observatory on Brownian Motion Behavior of 105 nm Sized Silica Particles During Chemical Mechanical Polishing of 4H-SiC by an Evanescent Field. Int. J. Autom. Technol. 2024. 18. 1. 47-57
Yutaka Terayama, Panart Khajornrungruang, Keisuke Suzuki, Hibiki Fujishima, Satomi Hamada, Yutaka Wada, Hirokuni Hiyama. Direct observation of removal of SiO2 nano-particles from silica surfaces: an evanescent field microscopy study and shear flow acting moment. Japanese Journal of Applied Physics. 2023. 62. SH
Tatsuya Nakasaki, Yushi Kinoshita, Panart Khajornrungruang, Edmund Soji Otabe, Keisuke Suzuki. Study on the suam double magnet system for polishing. International Journal of Automation Technology. 2023. 15. 4. 503-511
Thitipat Permpatdechakul, Panart Khajornrungruang, Keisuke Suzuki, Shotaro Kutomi. Study on a Novel Peeling of Nano-Particle (PNP) Process for Localized Material Removal on a 4H-SiC Surface by Controllable Magnetic Field. International Journal of Automation Technology. 2023. 17. 4. 410-421

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MISC (161)：

Takeiri Junpei, Suzuki Keisuke, Iura Hiroaki, Hantani Taisuke, Morii Masaki, Nishizawa Hideaki, KHAJORNRUNGRUANG Panart. Research on polished particles of novel carbon allotropes using fullerenes (2nd report). Proceedings of JSPE Semestrial Meeting. 2024. 2024S. 555-556
森井将希, 鈴木恵友, 西澤秀明, カチョーンルンルアンパナート, 判谷太輔. 水酸化フラーレンを用いたSiCウェハの高効率研磨に関する研究. 精密工学会学術講演会講演論文集. 2024. 2024S. 682-683
Kuroe Norita, Khajornrungruang Panart, Arima Yu, Hamada Satomi, Wada Yutaka, Hiyama Hirokuni. Real Time Nanoparticle Observation in Cleaning Phenomena by Evanescent Field: 7th report : Measurement Distance of Nano-Particle from Surface by using Defocus outside the Evanescent Field. Proceedings of JSPE Semestrial Meeting. 2024. 2024S. 688-689
Goto Daiki, Permpatdechakul Thitipat, Ouchida Shuka, Mizutani Kyo, Khajornrungruang Panart. Study on On-Machine Visualization of Surface Processing Phenomena in Nanoscale: 9th report: Verification of Nano-Particle Diameter Measurement Accuracy using Multi-wavelength Evanescent Field. Proceedings of JSPE Semestrial Meeting. 2024. 2024S. 284-285
Ouchida Shuka, Goto Daiki, Khajornrungruang Panart. Spectral Characteristic Verification of Multi-wavelength Evanescent Light Optical System set up with Pellin-Broca Prism. Proceedings of JSPE Semestrial Meeting. 2024. 2024S. 329-330

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Patents (40)：

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Books (1)：

半導体製造プロセスを支える洗浄・クリーン化・汚染制御技術
サイエンス&テクノロジー 2022 ISBN:4864282943

Lectures and oral presentations (276)：

Study on action forces on nano-particle to flat surface using localized remote magnetic field: 2nd report: Magnetic Force Estimation for Attaching a Particle to SiC Substrate Surface by Applying Multi-Wave Evanescent Field
(Proceedings of JSPE Semestrial Meeting 2024)
Study on action forces on nano-particle to flat surface using localized remote magnetic field: Estimation of action forces by applying multi-wavelength evanescent fields
(Proceedings of JSPE Semestrial Meeting 2023)
Study on Visualization of Cleaning Phenomena in Nano-scale by Evanescent Field: (Observation of Fluid Flow Velocity on the Surface being Cleaned)
(The Proceedings of Conference of Kanto Branch 2022)
Computational analysis of nano abrasive motion on SiC surface: Study on silica abrasive before attaching to the surface being polished
(Proceedings of JSPE Semestrial Meeting 2021)
Characteristic Evaluation of Scattering Light from Cutting edge in Evanescent Field by Using Numerical Simulation Method
(Proceedings of JSPE Semestrial Meeting 2021)

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Works (8)：

ナノスケール加工現象における作用単粒子の三次元空間追跡法及び粒径計測法の確立
2016 - 2019
機上ポリシング加工現象観察装置の開発およびその現象解析
2013 - 2015
レーザ一次回折光を用いた超微細穴加工工具の高精度化及び計測システムの開発
2011 - 2012
パルスレーザ光を用いた回転工具形状測定装置ならびにシステム
2011 - 2012
(AS2311249B)レーザー次回折光を用いた超微細穴加工工具の高精度化及び計測システムの開発
2011 -

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Education (3)：

- 2005 Osaka University Graduate School of Engineering Department of Mechanical Engineering and Systems
- 2002 Osaka University Graduate School of Engineering Department of Mechanical Engineering and Systems
- 2000 Osaka University School of Engineering Department of Mechanical Engineering

Professional career (3)：

Doctor of Philosophy in Engineering (Osaka University)
Master of Engineering (Osaka University)
Bachelor of Engineering (Osaka University)

Work history (8)：

2019 - 現在 Kyushu Institute of Technology Department of Intelligent and Control Systems, Mechanical Science and Technology Division Associate Professor
2016 - 2023 Kitakyushu National College of Technology Production Engineering Advanced Course Part-time Lecturer
2016 - 2019 Kyushu Institute of Technology Faculty of Computer Science and Systems Engineering, Department of Mechanical Information Science and Technology Associate Professor
2014 - 2016 Kyushu Institute of Technology Faculty of Computer Science and Systems Engineering, Department of Mechanical Information Science and Technology Assistant Professor
2013 - 2014 Clarkson University(USA) the Center for Advanced Materials Processing (CAMP) Visiting Research Associate Professor

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Committee career (9)：

2011 - 現在 the Japan Society for Precision Engineering (JSPE) Affiliate Committee
2008 - 現在 the Japan Society for Precision Engineering (JSPE) Planarization and CMP Technical Committee
2008 - 現在 the Japan Society for Precision Engineering (JSPE) Intelligent Nano-Measure Committee
2022 - 2023 the Japan Society for Precision Engineering Executive Committee, 2023 JSPE Autumn Meeting
2014 - 2018 日本光学会事業・企画担当幹事

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Awards (4)：

2024/09 - Fuji Technology Press Ltd. the IJAT Best Paper Award 2024 Study on a Novel Peeling of Nano-Particle (PNP) Process for Localized Material Removal on a 4H-SiC Surface by Controllable Magnetic Field
2013/06 - Machine Tool Engineering Foundation Machine Tool Engineering Foundation Encouragement Award Study on Evaluation Method for Surface Topography of CMP Polishing Pad using Laser Diffraction
2005/03 - Society of Automotive Engineers of Japan Graduate School Research Award
2003/06 - 一般社団法人型技術協会第13回型技術協会「奨励賞」レーザ回析法による小径工具切れ刃先端の3次元プロファイル計測

Association Membership(s) (5)：

The Optical Society of Japan , euspen , 砥粒加工学会 , 日本機械学会 , 精密工学会

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