Rchr
J-GLOBAL ID：200901023506698055   Update date: Jun. 13, 2024

Kaneko Tadao

カネコ タダオ | Kaneko Tadao
Research field  (1)： Machine materials and mechanics
Research keywords  (2)： 薄膜 ,  スパッタリング
Research theme for competitive and other funds  (4)：
  • 新型マグネトロンスパッタ装置による被膜の構造
  • 円筒型スパッタ装置の試作
  • Structure of Coating Films by New type of Magnetron Sputtering
  • Fabrication of Cylindrical Sputtering Apparatus
Papers (25)：
ｍore...
MISC (36)：
ｍore...
Education (2)：
  • - 1976 Gunma National College of Technology Mechanical Engineering
  • - 1976 Gunma National College of Technology
Professional career (1)：
  • (BLANK) (Tokyo Institute of Technology)
Association Membership(s) (3)：
日本真空協会 ,  炭素材料学会 ,  日本材料学会
※ Researcher’s information displayed in J-GLOBAL is based on the information registered in researchmap. For details, see here.

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