Research field (3):
Electric/electronic material engineering
, Applied physics - general
, Semiconductors, optical and atomic physics
Research keywords (7):
Electrocaloric effect
, 誘電体
, マイクロエレクトロメカニカルシステム
, 強誘電体薄膜
, Dielectrics
, Microelectromechanical system
, Ferroelectric Thin Films