Rchr
J-GLOBAL ID:200901085406072014
Update date: Sep. 27, 2024
Ishida Makoto
イシダ マコト | Ishida Makoto
Affiliation and department:
Job title:
Professor Emeritus
Homepage URL (2):
http://www.int.ee.tut.ac.jp/icg/
,
http://int.ee.tut.ac.jp/icg/wp/en/
Research field (2):
Electronic devices and equipment
, Electric/electronic material engineering
Research keywords (9):
crystal growth
, MEMS
, electronic material
, thin film
, smart sensor
, Integrated circuits
, sensor
, semiconductor devices
, Semiconductor Material
Research theme for competitive and other funds (37):
- 2013 - 2016 Brain implantable electronics for long-term neural recording
- 2008 - 2013 An implantable chip with integrated microprobe/tube arrays for electrical neural recording, stimulation, and drug delivery applications
- 2008 - 2012 強誘電体薄膜センサを用いたインテリジェントイメージセンシング
- 2007 - 2012 Frontiers of Intelligent Sensing
- 2005 - 2011 Development of Intergrated Ubiquitous Microsensor Devices for Peace and Security of Human Life
- 2006 - 2008 農業用マルチモーダルセンシングシステム
- 2005 - 2008 高性能赤外線センサの開発
- 2005 - 2008 超音波イメージセンサによる生育状況モニタおよび管理システムの開発
- 2005 - 2008 マイクロチップ技術による医療計測装置の開発
- 2005 - 2008 知能性基板を用いた高感度・超小型強誘電体薄膜スマートセンサの開発
- 2006 - 2008 Development of filterless spectral image sensors for bio-chip applications
- 2002 - 2007 インテリジェントヒューマンセンシング
- 2005 - 2007 Three-dimensional epitaxial silicon microprobe array integrated on highly functional smart sensing chip
- 2002 - 2006 ネットワーク融合型スマートセンサ
- 2002 - 2005 SMART MICRO CHIP BY SELECTIVE GROWN Si-MICROPROBE ELECTRODE ARRAY ON INTEGRATED CIRCUIT
- 2003 - 2005 Super Highly Sensitive Non visible Imaging Devices Using Vacuum Nano Technology
- 2001 - 2004 Substrate using epitaxial Al_2O_3 film for hetero-epitaxial growth and device applications
- 2003 - 2004 Analysis of spatio-temporarl mechanisms on outer plexiform layer in retina by the multichannel microprobe electrodes array chip
- 2001 - 2002 Analysis of spatio-temporal light responses of retinal cells using a new multi-electrode array on integrated circuit
- 2000 - 2001 単結晶シリコン選択成長による生体電位計測用スマート極微細多電極チップ形成の研究
- 1998 - 2000 FUNDAMENTAL RESEARCH FOR QUANTUM DEVICES CONSTRUCTED WITH MULTI-LAYERS OF VERY THIN EPITAXIAL Al2O3 AND Si
- 1998 - 1998 高専におけるLSI設計教育高度化に向けた調査研究
- 1998 - 1998 非晶質傾斜超格子を用いた極低雑音アバランシェ増幅型光導電膜の研究
- 1997 - 1998 Research on a vision chip based on biological systems
- 1996 - 1997 High-quality Si thin film growth on single-crystalline Al203 films
- 1995 - 1995 電子ビーム励起直接選択エピタキシャル成長による量子構造形成方法の研究
- 1994 - 1995 Silicon Accelerometer for high temperature applications with Double SOI structure
- 1994 - 1995 Basic research on selective epitaxy in very limited areas
- 1994 - 1994 電子ビーム励起直接選択エピタキシャル成長による量子構造形成方法の研究
- 1992 - 1992 紫外光励起ガスソースMBE法によるエピタキシャル絶縁薄膜の超低温形成に関する研究
- 1991 - 1992 In-situ Si selective-epitaxial grown SOI structures using Electron beam graphic system
- 1991 - 1991 紫外光励起ガスソ-スMBE法によるエピタキシャル絶縁薄膜の超低温形成に関する研究
- 1990 - 1990 紫外光励起ガスソ-スMBE法によるエピタキシャル絶縁薄膜の起低温形成に関する研究
- 1989 - 1990 超高真空中でのエキシマレ-ザ励起AlーSi界面形成過程のXPS分析による研究
- 1989 - 1990 Formation of Ultra-Thin Hetero-Epitaxial SOI Structure and Its Application to Thin Film Transistors.
- 1989 - 1989 超高真空中でのエキシマレ-ザ励起Al-Si界面形成過程の×PS分析による研究
- 1986 - 1987 Fundamental Research of Epitaxial Growth of Insulator Films Using Ultra-Violet Irradiation
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Papers (133):
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Sawako Tanaka, Young Joon Choi, Makoto Ishida, Kazuaki Sawada, Hiromu Ishii, Katsuyuki Machida, Yasuhiko Nikaido, Mitsumasa Saito, Shin ichi Yoshida. Sensing Legionella by photogate-type fluorescence sensor: Application to Legionella dumoffii. Electronics and Communications in Japan. 2020. 103. 11-12. 83-89
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Tanaka Sawako, Choi Yong Joon, Ishida Makoto, Sawada Kazuaki, Ishii Hiromu, Machida Katsuyuki, Nikaido Yasuhiko, Saito Mitsumasa, Yoshida Shinichi. Dependence of Fluorescence Intensity of Legionella on Excitation Light Intensity II. JSAP Annual Meetings Extended Abstracts. 2019. 2019.2. 3096-3096
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Wang-Hoon Lee, Young-Tae Lee, Jong-Wan Kim, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida. Wireless smart temperature sensor using pulse width modulation method. 2007 70th ARFTG Microwave Measurement Conference: High Power RF Measurement Techniques, ARFTG 2007. 2018. 1-4
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Yoshihiro Kubota, Shota Yamagiwa, Hirohito Sawahata, Shinnosuke Idogawa, Shuhei Tsuruhara, Rika Numano, Kowa Koida, Makoto Ishida, Takeshi Kawano. Long nanoneedle-electrode devices for extracellular and intracellular recording in vivo. Sensors and Actuators B: Chemical. 2018. 258. 1287-1294
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Yusuke Morikawa, Shota Yamagiwa, Hirohito Sawahata, Rika Numano, Kowa Koida, Makoto Ishida, Takeshi Kawano. Ultrastretchable Kirigami Bioprobes. Advanced Healthcare Materials. 2018. 7. 3
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MISC (263):
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田中 佐和子, 崔 容俊, 石田 誠, 澤田 和明, 石井 仁, 町田 克之, 二階堂 靖彦, 齋藤 光正, 吉田 眞一. フォトゲート型光センサによるレジオネラ属菌の菌種識別-Identification of Legionella Species by Photogate-Type Optical Sensor-第11回 集積化MEMSシンポジウム. 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]. 2019. 36. 5p
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田中佐和子, 大西脩平, 石田誠, 澤田和明, 石井仁, 町田克之, 二階堂靖彦, 齋藤光正, 吉田眞一. レジオネラ属菌の赤色蛍光の励起光照射時間依存性の検討. 応用物理学会秋季学術講演会講演予稿集(CD-ROM). 2018. 79th
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Yusuke Morikawa, Shota Yamagiwa, Hirohito Sawahata, Rika Numano, Kowa Koida, Makoto Ishida, Takeshi Kawano. Stretchable micro-doughnuts Kirigami bioprobe. 2018 IEEE Micro Electro Mechanical Systems (MEMS). 2018. 2018-January. 186-189
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Yuto Kita, Hiroshi Kubo, Hirohito Sawahata, Shota Yamagiwa, Xian Long Angela Leong, Rika Numano, Kowa Koida, Makoto Ishida, Takeshi Kawano. Single needle electrode-topped amplifier package (STACK) for in vivo applications. 2018 IEEE Micro Electro Mechanical Systems (MEMS). 2018. 2018-January. 178-181
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Shota Yamagiwa, Hirohito Sawahata, Rika Numano, Makoto Ishida, Kowa Koida, Takeshi Kawano. Dissolvable material-sheathed microneedle-electrode device slid into a narrow gap of the brain. 2018 IEEE Micro Electro Mechanical Systems (MEMS). 2018. 2018-January. 340-343
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Patents (42):
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HOLLOW MICROTUBE STRUCTURES, PRODUCTION METHOD THEREOF, AND LIVING ORGANISM INSPECTION DEVICE
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半導体集積装置およびその作製方法
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形状可変ミラー
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多層構造ウエハーおよびその製造方法
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LAMINATE STRUCTURE ON SEMICONDUCTOR SUBSTRATE
more...
Books (9):
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Integration Technology for Heterogeneous Advanced Devices : Basics and Applications
2012 ISBN:9784781305868
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集積回路
新インターユニバーシティ 2011 ISBN:9784274209888
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バイオテクノロジーシリーズ ヘルスケアとバイオ医療のための先端デバイス機器
シーエムシー出版 2009
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Fabrication and Properties of ultra small・Si wire arrays with circuits by Vapor-Liquid-Solid Growth
Digest of 11th Int. Conf. Solid-State Sensors and Actuators 2001
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Epitaxial technology for MEMS applications
Digest of 11th Int. Conf. Solid-State Sensors and Actuators 2001
more...
Lectures and oral presentations (5):
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Interdisciplinary Research at EIIRIS
(Irago Conf. 2014 2014)
-
Bio-Medical Applications of smart sensing devices
(SSDM2012 2012)
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Smart Micro Sensing Chips for Life Innovation
(2012 MRS Spring meeting & Exhibit 2012)
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Interdisciplinary Research of EIIRIS in Toyohashi Tech
(The 3rd International Symposium on Lifechips 2012)
-
Smart Micro Sensing Chips Using SOI Structures
(219th ECS Meeting 2011)
Works (3):
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MEMS Technology and Smart Sensors
2001 -
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Epitaxial Al<sub>2</sub>O<sub>3</sub> on Si and device applications
2001 -
-
Preparation method of Semiconductor thin films
2001 -
Education (3):
- - 1979 Kyoto University Graduate School of Engineering
- - 1979 Kyoto University Graduate School, Division of Engineering
- - 1973 University of Toyama Faculty of Engineering
Professional career (1):
- Dr of Engineering (Kyoto University)
Work history (6):
Committee career (1):
- 2010/05 - 2012/03 電気学会 理事 E部門長
Awards (8):
- 2014/05 - 電気学会 第23回業績賞
- 2014/03 - 電気学会 平成25年度 フェロー認定
- 2010/09 - 応用物理学会 フェロー表彰 第4回(2010年度)
- 2009/06 - IEEE Outstanding Paper Award Out-of-plane microwire force sensor arrays with embedded p-n diodes by selective vapor-liquid-solid growth
- 2009/05 - IEEJ Academic Promotion Award IEEJ Technical Developement Award
- 2008 - The NAGAI Foundation for Science and Technology Foundation's prize
- 1998 - SCHLUMBERGER AWARD'98
- 1995/07 - 日本工学教育協会 第4回日本工学教育協会賞
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Association Membership(s) (2):
IEEJ (The Institute of Electrical Engineers of Japan)
, JSAP (The Japan Society of Applied Physics)
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