Rchr
J-GLOBAL ID:201701007660812798
Update date: Sep. 29, 2025
Suzuki Haruka
スズキ ハルカ | Suzuki Haruka
Affiliation and department:
Job title:
Lecturer
Research field (1):
Applied plasma science
Research keywords (3):
プラズマ診断
, マイクロ波プラズマ
, 大気圧プラズマ
Research theme for competitive and other funds (8):
- 2022 - 2025 気体流および液体流を用いた弱減圧マイクロ波プラズマ生成と応用
- 2022 - 2025 気体流および液体流を用いた弱減圧マイクロ波プラズマ生成と応用
- 2021 - 2023 高周波プロセスプラズマにおいて真空容器壁面の状態がプラズマに与える影響の評価
- 2018 - 2021 ラジカル生成促進のための大気圧マイクロ波プラズマの電子温度制御技術の開発
- 2016 - 2019 Wide range radical production by atmospheric pressure microwave plasma with molecular gas and applications
- 2017 - 2019 大気圧プラズマCVD法による大面積ガスバリアSiN膜の高速堆積技術の開発
- 2017 - 2018 大規模表面処理のための長尺大気圧マイクロ波プラズマ装置開発
- 2016 - 2018 大気圧マイクロ波水蒸気プラズマによる高密度かつ高純度活性種の生成と応用
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Papers (33):
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Dohan Kim, Shunya Kawamura, Kodai Fujitani, Masayoshi Naito, Daiki Iino, Hiroyuki Fukumizu, Kazuaki Kurihara, Haruka Suzuki, Hirotaka Toyoda. Influence of sheath collisions on the ion angular distributions in a dual-frequency capacitively coupled plasma. Japanese Journal of Applied Physics. 2025
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Shunya Kawamura, Dohan Kim, Keita Ichikawa, Haruka Suzuki, Daiki Iino, Hiroyuki Fukumizu, Kazuaki Kurihara, Hirotaka Toyoda. Angular distribution measurement of high-energy ions and neutrals impinging on an RF electrode in a dual-frequency capacitively-coupled Ar plasma. Plasma Sources Science and Technology. 2025
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Dohan Kim, Shunya Kawamura, Masayoshi Naito, Daiki Iino, Hiroyuki Fukumizu, Kazuaki Kurihara, Haruka Suzuki, Hirotaka Toyoda. Measurement of energy-resolved ion angular distribution in a dual-frequency capacitively coupled argon plasma. Japanese Journal of Applied Physics. 2025
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Manabu Kyuzo, Kenta Harada, Ryota Izumi, Haruka Suzuki, Hirotaka Toyoda. Evaluation of the spatial structure of multiline emission in a capacitively coupled plasma using tomographic reconstruction. Japanese Journal of Applied Physics. 2024
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Kuboi, S., Kato, H., Akatsuka, Y., Suzuki, H., Toyoda, H. Time-varying mechanism of ion composition in a pulse-modulated Ar/C4F8/O2 dual-frequency capacitively coupled plasma. Japanese Journal of Applied Physics. 2024. 63. 1
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MISC (1):
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鈴木陽香. マイクロ波励起メートル級プラズマの生成とその特性. プラズマエレクトロニクス分科会会報. 2017. 66. 29-30
Patents (1):
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マイクロ波供給装置、プラズマ処理装置、及び、プラズマ処理方法
Lectures and oral presentations (167):
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アルカリ剤を用いたプラズマ 合成 Agナノ粒子の再溶解抑制
(第67回応用物理学会春季学術講演会 2020)
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Heat flux evaluation of the atmospheric pressure microwave line plasma from spatio-temporal temperature measurement of the slot-plate
(2020)
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容量結合型 プラズマ中におけるキャピラリープレート上部電位の推定
(第67回応用物理学会春季学術講演会 2020)
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パルス変調容量結合プラズマにおけるキャピラリープレート近傍のャージ量絶対評価
(第67回応用物理学会春季学術講演会 2020)
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Electromagnetic Analysis in a Long-scale Slot Plasma Excited by Microwave Travelling Wave
(12th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/13th International Conference on Plasma-Nano Technology & Science 2020)
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Education (3):
- 2013 - 2016 Nagoya University Graduate School, Division of Engineering
- 2011 - 2013 Nagoya University Graduate School, Division of Engineering
- 2007 - 2011 Nagoya University Faculty of Engineering
Professional career (1):
- Doctor of Engineering (Nagoya University)
Work history (3):
- 2019/04 - 現在 Nagoya University Center for Low-temperature Plasma Sciences (cLPS)
- 2017/04 - 現在 Nagoya University Graduate School of Engineering Electronics 1 Assistant Professor
- 2016/04 - 2017/03 Nagoya University Graduate School of Engineering
Committee career (8):
- 2020 - 2021/03 ISPlasma2021/IC-PLANTS2021 プログラム委員
- 2020 - 2021/03 ISPlasma2021/IC-PLANTS2021 実行委員
- 2019 - 2020/03 ISPlasma2020/IC-PLANTS2020 実行委員
- 2018 - 2019/03 ISPlasma2019/IC-PLANTS2019 実行委員
- 2017 - 2018/03 ISPlasma2018/IC-PLANTS2018 実行委員
- 2017 - 2018 40th International Symposium on Dry Process Ad Hoc Committee for 40th Anniversary Project
- 2018 - 40th International Symposium on Dry Process Executive Committee
- 2016 - 2017/03 ISPlasma2017/IC-PLANTS2017 実行委員
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Awards (6):
Association Membership(s) (3):
電気学会
, プラズマ・核融合学会
, 応用物理学会
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