Research theme for competitive and other funds (2)：
2022 - 2025 微細構造体内に浸入する液体挙動の解明
2015 - 2018 局所的なイオン流動現象の可視化観察および理論的究明
Papers (26)：
Ayako Yano, Kyoichi Hamada and Kenji Amagai. Evaluation of Coating Film Formation Process Using the Fluorescence Method. Coatings. 2021. 11. 9. 1076
Naoyuki Handa, Hirokuni Hiyama, Kenji Amagai and Ayako Yano. Experimental and Modeling Investigation of the Mechanism for Preventing Readhesion via Zeta Potential in the Spin-Rinse Process. ECS Journal of Solid State Science and Technology. 2021. 10. 4. 044002
N. Handa, H. Hiyama, K. Amagai and A. Yano. Experimental and Modelling Investigation of Re-Adhesion Mechanism of Detached Nanoparticles to Wafer Surface in Spin Rinse Process. ECS Journal of Solid State Science and Technology. 2020. 9. 6. 064001
ARAI Tsubasa, AMAGAI Kenji, YANO Ayako, HIYAMA Hirokuni, HAMADA Satomi, IMAI Masayoshi, HANDA Naoyuki. Study on droplet removal adhered on edge of the wafer. The Proceedings of Conference of Kanto Branch. 2020. 2020. 0
YANO Ayako, AMAGAI Kenji, MATSUMOTO Kazuki, HIYAMA Hirokuni, FUKUNAGA Akira, SHIMA Shohei, HANDA Naoyuki. Droplet Evaporation and Watermark Formation on Si Wafers with Various Films. Journal of the Japan Society for Precision Engineering. 2020. 86. 1. 65-70
Droplet Evaporation and Watermark Formation on Si-Wafers with Various Film
(17 th International Conference on Precision Engineering 2018)
Visualization of paint film formation process on spray coating
(13th International Symposium on Advanced Science and Technology in Experimental Mechanics 2018)
Flow Pattern Observation of Upper and Lower Surface Cleaning on Rotating Wafer
(2018 International Conference on Planarization/CMP Technology 2018)
Fundamental study of liquid removal from the wafer surface
(Clarkson University 22 nd International Symposium on Chemical-Mechanical Planarization 2018)
Study on Energy Recovery Ventilator with Water Spray Cooling System
(International Conference on Technology and Social Science 2018 2018)
2015 - 2017 Osaka University Graduate School of Engineering Science Department of Mechanical Science and Bioengineering
2013 - 2015 Osaka University Graduate School of Engineering Science Department of Mechanical Science and Bioengineering
2011 - 2013 Advanced Course, National Institute of Technology, Kagawa College Advanced Course in Electronics, Information and Communication Engineering
2006 - 2011 Takuma National College of Technology Department of Electronics
