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J-GLOBAL ID：200901002137428009 Update date: Sep. 24, 2024

Aketagawa Masato

アケタガワマサト | Aketagawa Masato

Affiliation and department：
Job title： Professor
Homepage URL (1)： http://mcweb.nagaokaut.ac.jp/~picotech/

Research field (1)： Manufacturing and production engineering

Research keywords (4)： Large scale dimension , Nanometer and picometer measurement and control , Optical measurement and control , Precision measurement and control

Research theme for competitive and other funds (43)：

2020 - 2023 Picometer positioning control in air by ultra-high resolution displacement measurement and drive system
2019 - 2022 Development of real-time high-precision optical gauge using pulse train spacing length
2017 - 2020 Absolute surface shape / high-speed in-plane displacement measurement method using multicolor frequency stabilized LD and high-speed camera
2017 - 2019 Development of in-line absolute length measuring device active to measurement requirements
2015 - 2017 Iodine frequency stabilized laser diode for high-speed/high precision displacement-measuring interferometer based on sinusoidal frequency modulation

2014 - 2017 Absolute length measurement in air using multiple-color frequency stabilized light source

2015 - 2016 超高速計測可能な軸受不要誤差5自由度誤差計測装置の開発

2015 - 2016 半導体レーザの周波数変調による測長干渉計の開発

2015 - 2016 正弦波周波数変調によるヨウ素安定化LDと超高分解能超高速干渉測長計の開発

2014 - 2016 多色光源による同時共鳴周波数追尾による空気中での絶対長さ測定

2013 - 2015 Enhancement of near-field thermal radiative heat transfer by micro-nano structures

2013 - 2015 Development of length standard calibration system based on optical frequency comb

2013 - 2015 The development of optical chamber which can maintain temperature and absolute air refractive index using geometrical path compensation

2014 - 2015 レーザーによる測長ー周波数変調によるホモダイン干渉計の実現

2014 - 2015 変調レーザを用いた測長法の開発-軸受不要5自由度誤差運動一括測定装置への応用

2012 - 2015 軸受の5自由度寄生運動の高精度高速一括計測システムの開発

2012 - 2014 軸受の5自由度寄生運動の高精度高速一括計測システムの開発

2009 - 2011 Study on the mechanisms of Grain boundary diffusion of polar ice

2009 - 2011 Manufacture of calibration and measurement surface standards for areal surface texture measuring instruments and their international standardization

2008 - 2010 Absolute length measurement with sub-nanometer accuracy using frequency standard

2004 - 2008 Investigation of micro-physical and chemical processes in polar ice sheet using high-resolution laser techniques

2006 - 2007 精密軸受回転誤差の結晶格子を基準とするピコメートル直接計測法の開発

2005 - 2007 Displacement measuring interferometer with picometer resolution from frequency shift using meter definition

2004 - 2006 Evaluation of Optical Properties of Dye-sensitized Solar Cell Incorporating Mesoscopic Interfacial Roughness

2003 - 2004 Development of software gauge and material measure with large area to standardize analytic tools for surface topography data

2003 - 2004 マルチプローブによる結晶格子を基準とするピコメートルエリアエンコーダの開発

2002 - 2004 Length measurement method with resolution of picometer using high-finesse optical cavity and regular crystalline lattice

2001 - 2002 Ultra precise 2-dimensional atomic tracking control for atom craft

2000 - 2001 Ultra precise 2-dimensional atomic tracking control for atom craft

2000 - 2001 Trial manufacturing of isotropic random surfaces for calibration and uncertainty analysis of surface profiling instruments

1999 - 2000 Digital angle reference by referring atomic array on crystalline surface

1998 - 1999 Development of ultra precision straight-motion stage by referring a crystalline array on crystalline surface

1997 - 1999 Functional evaluation of surface waviness of contact recording magnetic disk and analytical estimation of head flying locus

1998 - 1998 表面テクスチャの三次元測定規範と形状評価パラメータの国際標準化支援研究

1997 - 1998 結晶格子を用いた実時間2次元ナノベクトルエンコーダの開発とアトムクラフトへの展開

1996 - 1998 結晶格子をスケールとするサブナノメートル測長・加工機の開発研究

1996 - 1996 熱ドリフトフリー結晶格子ナノスケールの開発と格子NCマシーンへの適用

1995 - 1995 結晶格子スケールの高精度化と格子カウンターの試作(光波絶対測長との比較)

1990 - 1992 Research of Ultra Precision Linear Digital Scale by Using Regular Crystalline Lattice

圧電素子を用いた高速かつ滑らかに運動するステージの開発

同心円状回折格子干渉計を用いたスピンドルの誤差測定

韓国におけるサブナノメートル計測制御加工研究調査

ナノメートル領域までの表面粗さ測定を向上させる表面実量器の製作

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Papers (119)：

HIGUCHI Masato, KATAGIRI Katsunari, NAKAGAWA Takehiro, SATO Taku, AKETAGAWA Masato. Development of Band-Limitless Demodulation Method for Sinusoidal Phase Modulation Interferometry (Evaluation of Noise Floors, Maximum Measurement Speeds and Resolutions). Journal of the Japan Society for Precision Engineering. 2024. 90. 1. 153-158
Dong Wei, Taiga Fujiyama, Masato Aketagawa. High-resolution demodulation of interference envelope peak at arbitrary positions by warped discrete Fourier transform. Results in Optics. 2022. 6. 100218-100218
Masato Higuchi, Dong Wei, Masato Aketagawa. Displacement measuring interferometer for sub-nano meter resolution. Measurement: Sensors. 2021. 18. 100336-100336
Dong Wei, Yusuke Nagata, Motohisa Sano, Masato Aketagawa. A scanner error discriminator based on short-time Fourier transform in pulse train interferometry. Optics Communications. 2021. 488
Dong Wei, Yusuke Nagata, Motohisa Sano, Masato Aketagawa. Cluster analysis based fringe-activity range detector. Optics Communications. 2021. 483

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MISC (178)：

Takano Satoru, Takata Ukyo, Abe Shodai, Yamada Yohei, Yasuhara Toshinori, Aketagawa Masato. Straightness measurement with laser beam and deep learning: Support for working distance change. Proceedings of JSPE Semestrial Meeting. 2023. 2023A. 484-485
佐藤拓, 樋口雅人, 長岡樹, 明田川正人. 正弦波位相変調干渉計における新しい二次元面内変位復調法の提案. 精密工学会学術講演会講演論文集. 2023. 2023A. 520-521
竹岡響, 高野悟, 堀江光司, 明田川正人, 山田洋平, 安原寿規. 真直度測定機におけるディープラーニングを用いた補償方法の開発と教師データ取得装置の試作. 精密工学会学術講演会講演論文集. 2023. 2023S. 390-391
坂井亮太, 飯尾和司, 萩ノ谷悠斗, 明田川正人. 結晶格子スケールの格子間隔以下補間法の実験的検証と応用. 精密工学会学術講演会講演論文集. 2023. 2023S. 354-355
武政昇弥, 樋口雅人, 櫻井文仁, 明田川正人. 正弦波位相変調干渉計を用いたインプロセス計測手法の開発. 精密工学会学術講演会講演論文集. 2023. 2023S. 379-379

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Books (1)：

Practical handbook of precisionpositioning technology
In Tech Information s.c.Ltd. 2008 ISBN:9784915957499

Lectures and oral presentations (64)：

Displacement measurement using I2 frequency stabilized laser diode based on sinusoidal phase/frequency modulation
(LAMDAMAP2017 2017)
正弦波周波数変調による半導体レーザの周波数安定化と変位計測干渉計の開発
(光計測シンポジウム2016 2016)
Accurate displacement measurement using I2 frequency stabilized laser diode based on sinusoidal frequency modulation
(EOSAM2016 2016)
スピンドル誤差運動測定装置の開発 4,000rpm 時の誤差運動
(2016年度精密工学会春季大会学術講演会 2016)
Concurrent measurement method of spindle error motions using concentric circle grating and frequency modulation interferometers
(ISEEE2015 2015)

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Education (2)：

- 1985 Tokyo Institute of Technology Graduate School, Division of Integrated Science and Engineering
- 1983 Tokyo Institute of Technology Faculty of Science

Professional career (2)：

博士(工学) (長岡技術科学大学)
理学修士 (東京工業大学)

Work history (5)：

2011/04/01 - 現在 Nagaoka University of Technology
2007/04/01 - 2011/03/31 Nagaoka University of Technology
1999/01/01 - 2007/03/31 Nagaoka University of Technology
1991/06/01 - 1998/12/31 Nagaoka University of Technology
1985/04/01 - 1990/12/31 キャノン株式会社光学機器事業部・半導体機器開発センター・研究員

Awards (8)：

2017/11/15 - Asian Society for Precision Engineering and Nanotechnology Best Paper Award
2013/11/15 - Asian Society for Precision Engineering and Nanotechnology Best Paper Award
2012/11/01 - 新潟日報社第65回新潟日報文化賞(学術部門) サブナノメートル・ピコメートル計測制御
2011/03/15 - 精密工学会 JSPE Best Paper Award 周波数可変ダイオードレーザを光源とする位相変調ホモダイン変位計測干渉計
2009/11/15 - Asian Society for Precision Engineering and Nanotechnology Best Paper Award

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Association Membership(s) (5)：

日本光学会 , Optical Society of America , 応用物理学会 , American Society for Precision Engineering , 精密工学会

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