Rchr
J-GLOBAL ID:200901008364965671   Update date: Apr. 03, 2020

Yamauchi Satoshi

ヤマウチ サトシ | Yamauchi Satoshi
Affiliation and department:
Job title: Professor
Research field  (4): Electronic devices and equipment ,  Semiconductors, optical and atomic physics ,  Functional solid-state chemistry ,  Electric/electronic material engineering
Research keywords  (2): 銅薄膜の気相選択形成 ,  Plasma Processing, Hetero-epitaxial growth, Zinc-Oxide film, Titanium-Oxide film, Light-emitting devices, Photo-Catalist, Super-hydrophilicity
Research theme for competitive and other funds  (1):
  • 2017 - 2020 Selective Cu-deposition using CuI as precursor
Papers (55):
  • T. Nishikawa, S. Yamauchi. Selective Cu-deposition by LPCVD using CuI. Extended Abstract of ADMETA plus 2016 Asian Session. 2016. 22-23
  • Satoshi Yamauchi, Taiji Nishikawa. Selective Cu-deposition by LPCVD using CuI. Extended Abstract of ADMETA plus 2016. 2016. 22-23
  • Satoshi Yamauchi, Keisuke Yamamoto, Sakura Hatakeyama. Enhanced Photo-Induced Property of LPCVD-TiO2 Layer on PCVD-TiOx Initial Layer. Journal of Materials Science and Chemical Engineering. 2015. 3. 7. 28-38
  • Satoshi Yamauchi, Kazuhiro Ishibashi, Sakura Hatakeyama. Drastic Resistivity Reduction of CVD-TiO2 Layers by Post-Wet-Treatment in HCl Solution. Journal of Crystallization Process and Technology. 2015. 5. 24-30
  • Satoshi Yamauchi, Kazuhiro Ishibashi, Sakura Hatakeyama. Low Resistive TiO Deposition by LPCVD Using TTIP and NbF5 in Hydrogen-Ambient. Journal of Crystallization Process and Technology. 2015. 5. 12-23
more...
MISC (20):
  • S. Yamauchi, S. Hatakeyama, Y .Imai, M. Tonouchi. Nondestructive evaluation of Lactose including anomer and crystallized particles. Proc. International Workshop on Optical Terahertz Science and Technology 2013. 2013. Th3-38
  • S. Hatakeyama, S. Yamauchi, Y .Imai, M. Tonouchi. TERAHERTZ-TIME DOMAIN SPECTROSCOPY FOR LACTOSE ANALYSIS ON THE STEREOISOMER AND THE PARTICLE SIZE. Proc. 3rd International Symposium on Terahertz Nanoscience. 2012. 54
  • Y .Imai, T. Kuroda, S. Yamauchi, H. Yokota, M. Tonouchi. ANALYSIS OF MULTILAYERED THz WAVEGUIDE BY USING POLYMER TUBES WITH DIFFERENT INDICES. Proc. 3rd International Symposium on Terahertz Nanoscience. 2012. 56
  • S. Yamauchi, Y .Imai, M. Tonouchi. Qualitative and quantitative analysisi of lactose-anomer by THz-TDS. Proc. International Symposium on Terahertz Nanoscience. 2011. 204
  • Y. Imai, S. Yamauchi, H. Yokota, S. Wei. Measurement of nonlinear refractive index by using input-output characteristics in OFRR nonlinear dynamics. Proc. 21th International Conference on Optical Fiber Sensors. 2011. 8011-31
more...
Patents (3):
  • 銅の成膜装置、銅の成膜方法、銅配線形成方法、銅配線
  • テラヘルツ波を用いた異物検査装置及びその方法
  • テラヘルツ電磁波を用いた試料の構造分析方法およびテラヘルツ電磁波を用いた試料の構造分析装置
Books (2):
  • プラズマCVDにおける成膜条件の最適化に向けた反応機構の理解とプロセス制御・成膜事例
    サイエンス&テクノロジー 2018 ISBN:9784864281706
  • ディスプレイ・光学部材における薄膜製造技術
    情報機構 2007 ISBN:9784901677837
Lectures and oral presentations  (33):
  • ヨウ化銅を用いたルテニウム上への銅の選択化学気相堆積
    (第80回応用物理学会秋季学術講演会 2019)
  • ヨウ化銅を用いたLPCVD法による銅膜の高速成長
    (平成 30 年度 電気学会東京支部 茨城支所 研究発表会 2018)
  • αーラクトースによるTHz波発振特性
    (第25回電気学会東京支部茨城支所研究発表会 2017)
  • 低圧化学気相堆積法を用いた高効率な光触媒性を有する酸化チタン薄膜の形成
    (第25回電気学会東京支部茨城支所研究発表会 2017)
  • CuIを原料とするLPCVD法による選択的なCu堆積II
    (第25回電気学会東京支部茨城支所研究発表会 2017)
more...
Education (1):
  • - 1991 Tohoku University Graduate School, Division of Engineering Electronic Engineering
Professional career (1):
  • Dr. Engineering (Tohoku University)
Work history (2):
  • 1997/04 - Ibaraki Univeristy
  • 1991/04 - 1997/03 Oki Electric Industry Co., Ltd.
Awards (1):
  • 1989 - Materials Research Society Graduate Student Awards
Association Membership(s) (4):
材料技術研究協会 ,  The Japan Society of Applied Physics ,  The Institute of Electrical and Electronics Engineers (IEEE) ,  Materials Research Society (MRS)
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