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J-GLOBAL ID:200901008578117619   Update date: Jan. 31, 2024

Takahashi Kazuo

タカハシ カズオ | Takahashi Kazuo
Affiliation and department:
Job title: Associate Professor
Research field  (3): Electric/electronic material engineering ,  Basic plasma science ,  Applied plasma science
Research keywords  (2): プラズマ物性工学 ,  Plasma science and technology
Research theme for competitive and other funds  (22):
  • 2012 - 2017 Measurements, Analyses and Control of Fine-Particle Plasmas
  • 2012 - 2014 微粒子プラズマナノ界面における化学反応の解析と浮遊型熱センサの開発
  • 2011 - 2012 Skeletal muscle cell activation by atmospheric plasma exposure and application to tissues
  • 2010 - 2011 微粒子プラズマ中のナノ界面における熱ダイナミクスの解明
  • 2008 - 2009 Analyses of chemical reaction producing carbonized-metal for ULSI plasma etching process
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Papers (75):
  • Tomoyuki Nonaka, Kazuo Takahashi, Akimi Uchida, Stefan Lundgaard, Osamu Tsuji. Effects of C4F8 plasma polymerization film on etching profiles in the Bosch process. Journal of Vacuum Science & Technology A. 2023. 41. 6
  • Kazuo Takahashi, Atsushi Yuri, Yosuke Sanada, Tomoya Ohara, Ryota Ukai. Inactivating gram-positive microorganism by using atmospheric pressure discharges with water mist. Japanese Journal of Applied Physics. 2023. 62. 1. 016003-016003
  • Didar Batryshev, Almasbek Utegenov, Rakhymzhan Zhumadilov, Nazym Akhanova, Sagi Orazbayev, Sultan Ussenkhan, Jiashu Lin, Kazuo Takahashi, Nuriya Bastykova, Sandugash Kodanova, et al. Carbon nanoparticles characteristics synthesized in pulsed radiofrequency discharge and their effect on surface hydrophobicity. Contributions to Plasma Physics. 2022. 62. 10
  • Yuhi Inada, Shusuke Yamashita, Shuya Murakami, Kazuo Takahashi, Takeshi Yamao, Shu Hotta. Direct fabrication of a diffraction grating onto organic oligomer crystals by focused ion beam lithography followed by plasma etching. Japanese Journal of Applied Physics. 2021. 60. 12. 120901-120901
  • Kazuo Takahashi. Interaction between charged particles demonstrated in microgravity experiments of dusty plasmas. 2021
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MISC (8):
  • Itooka Koki, Takahashi Kazuo, Izawa Shingo. 3P-097 Sterilization effect of atmospheric pressure low temperature plasma on yeast cells and its mechanism analysis. 2015. 67. 295-295
  • Totsuji H., Takahashi K., Adachi S., Tonouchi M., Totsuji C. Distribution of fine particles in cylindrical plasmas : Comparison between theory and simulations. Meeting abstracts of the Physical Society of Japan. 2013. 68. 2. 206-206
  • ADACHI Satoshi, TOTSUJI Hiroo, TAKAHASHI Kazuo, HAYASHI Yasuaki, TAKAYANAGI Masahiro. International Collaboration on Complex Plasmas Research. JASMA. 2010. 27. 3. 137-142
  • ADACHI Satoshi, TAKAYANAGI Masahiro, TOTSUJI Hiroo, HAYASHI Yasuaki, TAKAHASHI Kazuo. Current Status and Future Plans of Microgravity Experiments in Dusty Plasmas in JAXA. 2009. 26. 4. 350-350
  • ONO Kouichi, TAKAHASHI Kazuo, ERIGUCHI Koji. Dry Etching Technology of High Dielectric Constant (High-k) Materials. Journal of plasma and fusion research. 2009. 85. 4. 185-192
more...
Patents (4):
  • プラズマを用いた微粒子配列装置及び微粒子配列方法
  • マイクロアレイ用基板
  • マイクロアレイ用基板の製造方法
  • 低誘電率多孔質膜の作成方法
Books (4):
  • Carbon clustering and diamond nucleation in fluorocarbon plasmas
    New Vistas in Dusty Plasmas (AIP Conference Proceedings Vol. 799) (American Institute of Physics, New York) 2005
  • Production mechanism and chemical structure of dust particles in fluorocarbon plasmas
    Dusty Plasmas in the New Millennium (AIP Conference Proceedings Vol.649) (American Institute of Physics, New York) 2002
  • Determination factor of Coulomb crystal structure in dusty plasmas
    Frontiers in Dusty Plasmas (Elsevier, Amsterdam) 2000
  • Structures of Coulomb crystals from growing particles in a plasma(共著)
    Advances in Dusty Plasmas (World Scientific, Singapore) 1997
Lectures and oral presentations  (4):
  • Properties of Passivation Films and Influences on Profile in the Bosch Process
    (2023)
  • Ion bombardment on microorganism in dusty plasmas
    (International Conference on Phenomena in Ionized Gases (ICPIG) XXXV 2023)
  • Chemical composition and surface morphology of films polymerized by C4F8 plasmas in Bosch process
    (International Conference on Phenomena in Ionized Gases (ICPIG) XXXV 2023)
  • Etching Characteristics of GaN in Hydrogen-added Fluorocarbon Plasmas
    (The 14th EU-Japan Joint Symposium on Plasma Processing (JSPP-14) 2023)
Education (6):
  • - 2001 Kyoto University
  • - 2001 Kyoto University Graduate School, Division of Engineering Department of Electonic Science and Engineering
  • - 1998 Kyoto Institute of Technology
  • - 1998 Kyoto Institute of Technology Graduate School, Division of Engineering and Design Science
  • - 1996 Kyoto Institute of Technology
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Professional career (2):
  • Doctor of Engineering (Kyoto University)
  • Master of Engineering (Kyoto Institute of Technology)
Work history (13):
  • 2015/04 - 現在 Kyoto Institute of Technology Faculty of Electrical Engineering and Electronics Associate Professor
  • 2019/09 - 2019/09 フランス共和国オルレアン大学客員研究員
  • 2019/04 - 2019/04 中華民国国立台湾科学技術大学客員教授
  • 2018/12 - 2018/12 カザフスタン共和国アル-ファラビカザフ国立大学客員教授
  • 2015/04 - 2015/10 Visiting Professor, University of Orleans
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Committee career (15):
  • 2015 - 現在 European Space Agency PK-4 Facility Science Team Member
  • 2021 - 2023/03 応用物理学会 プラズマエレクトロニクス分科会幹事
  • 2015 - 2019 宇宙航空研究開発機構 宇宙環境利用専門委員会委員
  • 2016 - 2018 応用物理学会関西支部 諮問委員
  • 2012 - 2016 宇宙航空研究開発機構 大学共同利用システム研究員
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Awards (8):
  • 2005 - DPS (Dry Process Symposium) 2004 Award for Young Researcher
  • 2005 - . 2005 International Symposium on Dry Process,DPS 2004 Award (Young Researcher Award)
  • 2002 - DPS (Dry Process Symposium) 2001 Award for Young Researcher
  • 2002 - 2002 International Symposium on Dry Process,DPS 2001 Award (Young Researcher Award)
  • 1999 - 第24回熊谷記念真空科学論文賞
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Association Membership(s) (4):
American Vacuum Society ,  日本航空宇宙学会 ,  日本真空協会 ,  応用物理学会
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