Shizuoka University
Graduate School of Integrated Science and Technology Department of Engineering - Applied Chemistry and Biochemical Engineering Course
B-atom release from metal wires boronized by non-explosive boron compounds
(82nd Annual Meeting of the Society of Chemical Engineers 2017)
Decomposition Processes of Polymers used for Photoresists by H Atoms Produced on Hot Wire Surfaces
(9th Hot-Wire Chemical Vapor Deposition Conference 2016)