J-GLOBAL ID:200901023396094981   Update date: Sep. 02, 2019


ヤマモト ヒデキ | YAMAMOTO Hideki
Affiliation and department:
Job title: Associate Professor
Research field  (1): Electron device/Electronic equipment
Research keywords  (1): Electronic Devices
Research theme for competitive and other funds  (1):
  • Study of laser-beam lithographic system
Papers (9):
MISC (7):
Works (1):
  • Detection of focal point using a knife edge method in laser-beam lithographic system
Education (1):
  • - 1989 Tottori University Faculty of Engineering
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