Uehara Masato

Affiliation and department：
Homepage URL (1)： https://staff.aist.go.jp/m.uehara/

Research keywords (1)： piezoelectricity, ferroelectricity, thin film, nitride, TEM, nanocrystal,

Research theme for competitive and other funds (12)：

2024 - 2027 窒化物圧電薄膜におけるミクロ組織の設計ストラテジーの確立
2022 - 2026 多元窒化物の高い圧電性の実態に迫るオペランドXASによる局所構造と元素物性の解析
2021 - 2024 窒化アルミニウム基エピタキシャル薄膜を用いた強誘電性サイズ効果の解明
2018 - 2021 Fabrication of Metal-Doped-AlN Piezoelectric Nanorod and Investigation on the Properties
2016 - 2019 Development of plasma sputtering device for paramagnetic and low melting point metal target

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Papers (137)：

Kenji Hirata, Kodai Niitsu, Sri Ayu Anggraini, Taisuke Kageura, Masato Uehara, Hiroshi Yamada, Morito Akiyama. Enhancing the piezoelectric performance of nitride thin films through interfacial engineering. Materials Today. 2025. 83. 85-95
Kenji Hirata, Kodai Niitsu, Sri Ayu Anggraini, Taisuke Kageura, Masato Uehara, Hiroshi Yamada, Morito Akiyama. Enhancing the piezoelectric performance of nitride thin films through interfacial engineering. MATERIALS TODAY. 2025. 83. 85-95
Masato Uehara, Kenji Hirata, Yoshiko Nakamura, Sri Ayu Anggraini, Kazuki Okamoto, Hiroshi Yamada, Hiroshi Funakubo, Morito Akiyama. Excellent piezoelectric and ferroelectric properties of ScxGa1-xN alloy with high Sc concentration. APL Materials. 2024
Itsuki Misono, Taisei Motomura, Tatsuo Tabaru, Masato Uehara, Tetsuya Okuyama. Effect of plasma discharge pulse length for GaN film crystallinity on sapphire substrate by high density convergent plasma sputtering device. Journal of Vacuum Science & Technology A. 2024
Kenji Hirata, Yu Ikemoto, Masato Uehara, Hiroshi Yamada, Sri Ayu Anggraini, Morito Akiyama. Effect of phase transition on the piezoelectric properties of scandium-alloyed gallium nitride. Journal of Applied Physics. 2024

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MISC (49)：

井口航平, 岩崎渉, 上原雅人, 大曲新矢, 本村大成, 森田伸友, 伊藤高廣, 村上直. AlN膜の結晶性と弾性表面波デバイスの特性に関する研究. 精密工学会学術講演会講演論文集. 2021. 2021A. 360-361
Toyofuku Tomoya, Hirata Kenji, Anggraini Sri Ayu, Akiyama Morito, Uehara Masato, Yamada Hiroshi. First-principles evaluation of piezoelectric properties in Mg+W doped AlN. JSAP Annual Meetings Extended Abstracts. 2021. 2021.1. 1556-1556
Furuta Koga, Hirata Kenji, Anggraini Sri Ayu, Akiyama Morito, Uehara Masato, Yamada Hiroshi. Evaluation of spontaneous polarization properties of Sc_xAl_1-xN by first-principles calculation. JSAP Annual Meetings Extended Abstracts. 2021. 2021.1. 1557-1557
Hirata Kenji, Mori Yuto, Yamada Hiroshi, Uehara Masato, Anggraini Sri Ayu, Akiyama Morito. Phase stability and piezoelectric properties of wurtzite phase in YbAlN: A first-principles study. JSAP Annual Meetings Extended Abstracts. 2021. 2021.1. 1558-1558
山田浩志, 上原雅人, Sri Ayu Anggraini, 平田研二, 秋山守人. 金属元素固溶による新規窒化物圧電薄膜の開発. Fine ceramics report. 2021. 39. 1. 22-25

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Education (3)：

1995 - 1998 Kyushu University
1993 - 1995 Kyushu University Interdisciplinary Graduate School of Engineering Sciences
1989 - 1993 Kyushu University

Professional career (1)：

Work history (4)：

Association Membership(s) (7)：

日本金属学会 , 日本顕微鏡学会 , 応用物理学会 , 軽金属学会 , 日本セラミックス協会 , 日本誘電体学会 , 放射光学会

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