2020 - 2023 Measurement System of Ground Potential Fluctuations at Natural Disasters in National College of Technology and Its Application to Disaster Education
Preparing of functional thin films using plasma prcess
Preparing of the thin films using processing plasma
Study on Growth Process of Particulate in Silane Plasma
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Papers (207):
Takahiko Satake, Tamiko Ohshima, Shin-ichi Aoqui, Hiroharu Kawasaki. Relation between target property and prepared film qualities by sputtering deposition with mixed powder targets. 2024. 13. 5. 48-53
Takahiko Satake, Tamiko Ohshima, Shin ichi Aoqui, Hiroharu Kawasaki. Crystal Al-Doped ZnO Thin-Film Preparation by Sputtering Deposition using a Mixed-Powder Target. International Journal of Recent Development in Engineering and Technology. 2024. 13. 3. 1-7
Takahiko Satake, Hiroharu Kawasaki, Shin-ichi Aoqui. Preparation of Ti and Fe Composition Gradient Thin Films by Sputtering with Mixed Powder Targets. e-Journal of Surface Science and Nanotechnology. 2023. 21
Hiroharu Kawasaki, Tamiko OHSHIMA, Yoshihito YAGYU, Takeshi Ihara, Kazuhiko Mitsuhashi, Hiroshi Nishiguchi, Yoshiaki Suda. Preparation of functional thin films with elemental gradient by sputtering with mixed powder targets. Jpn. J. Appl. Phys. 2021. 60. SF
Hiroharu Kawasaki, Yoshiaki Suda. Prediction of Natural Disasters and its Application to Education Using Simple Type Space Potential Fluctuation Detector. IEEJ Transactions on Fundamentals and Materials. 2021. 141. 8. 458-463
川崎仁晴, 茂木貴之. Development of a remote experiment system for students in faculty of electrical and electronic engineering: I. 応用物理学会秋季学術講演会講演予稿集(CD-ROM). 2023. 84th
出井和音, 猪原武士, 浜田裕康, 竹市悟志, 日比野祐介, 柳生義人, 川崎仁晴. Development of a Highly Controllable All-Solid-State Bipolar Nanosecond Pulsed Power Supply. プラズマ・核融合学会年会(Web). 2023. 40th
川崎仁晴, 佐竹卓彦, 佐竹卓彦, 青木振一. Preparation of the gradient element with two-dimensional spatial distribution of elements using powder mixture targets. 応用物理学会春季学術講演会講演予稿集(CD-ROM). 2023. 70th
柳生義人, 馬塲雄成, 大島多美子, 日比野祐介, 竹市悟志, 佐竹卓彦, 猪原武士, 川崎仁晴, 林信哉. Development of a Non-equilibrium Atmospheric Pressure Plasma Irradiation Device for in vivo Cancer Treatment. 応用物理学会秋季学術講演会講演予稿集(CD-ROM). 2023. 84th
川崎仁晴, 茂木貴之, 佐竹卓彦. Development of a remote electrical and electronic engineering student laboratory apparatus: I. 電気学会研究会資料(Web). 2023. FIE-23-017-025
Trial of elemental gradient functional thin films preparation by sputtering with mixed powder targets and their applications
(2024)
Relation between crystallinity of the films and solid density of the target by sputtering depotion with mixture powder targets
(2023)
Dependence of the film qualities on the solied densities of the targets prepared by sputtering deposition with mixture powder targets
(Global Plasma Forum in Aomori 2023)
2021/10 - The Japan Society of Applied Physics The 82th JSAP Autumn Meeting Poster Award Preparation of the gradient element functional thin films by sputtering deposition method using powder mixture target I