Research field (3):
Electronic devices and equipment
, Electric/electronic material engineering
, Optical engineering and photonics
Research theme for competitive and other funds (5):
2011 - 2013 Development of A Recycling Technology for Useful Metals from Wasted FPDs, CRTs, PWBs, and Others
2004 - 2005 Recycle of Silica Glass from Waste Silicate Glass/Hydrofluoric Acid, and Mechanism of Removing Metallic Icons from Silicate Glasses
2001 - 2003 Research on Optical Wave Control Devices using A Fluorinated Silicon Oxide Thin-Films Formed by Selective Liquid Phase Deposition
1997 - 1998 Development of Highly Efficient organic Electroluminescent Devices and Improvement of Their Stability
FPD・CRT・蛍光管からの有用金属回収・リサイクルに関する研究
Papers (72):
T. Matsumoto, T. Homma. Effect on Etch Rate and Surface Roughness of Crystal Orientation of Polycrystalline Silicon Used for Consumable Parts of Reactive Ion Etching Equipment. ECS Journal of Solid State Science and Technology. 2022. 11. 8. Online
T. Matsumoto, J. Kataoka, R. Saito, T. Homma. Recycling SiC Focus Rings for Reactive Ion Etching Equipment by Insertless Diffusion Bonding using Hot Isostatic Pressing. ECS Journal of Solid State Science and Technology. 2020. 9. 12. Online
T. Matsumoto, R. Saito, T. Homma. Improvement of Process Reproducibility and Particle Reduction for YF3 Coating by Collision Assisted Sintering Process in Reactive Ion Etching. 2020. 9. 6
○H. Koizumi, K. Ooshiro, K. Soeda, T. Homma. Effect of Drying Condition of Emitting Layer Formed by Ink-Jet Coating on Optical Property and Film Morphology of Polymer-Based Organic Light-Emitting Diodes. ECS J. Solid State Science and Technology. 2019. 8. 2. R36-R41
H. Koizumi, J. Watabe, S. Sugiyama, H. Hirabayashi, Y. Tokuno, H. Wada, T. Homma. Properties of Ce3+ doped Y3Al5O12 phosphor nanoparticles formed by laser ablation in liquid for LEDs. ECS Journal of Solid State Science and Technology. 2018. 7. 6. R63-R69