Research field (3):
Electronic devices and equipment
, Electric/electronic material engineering
, Optical engineering and photonics
Research theme for competitive and other funds (1):
FPD・CRT・蛍光管からの有用金属回収・リサイクルに関する研究
Papers (68):
T. Matsumoto, J. Kataoka, R. Saito, T. Homma. Recycling SiC Focus Rings for Reactive Ion Etching Equipment by Insertless Diffusion Bonding using Hot Isostatic Pressing. ECS Journal of Solid State Science and Technology. 2020. 9. 12. Online
T. Matsumoto, R. Saito, T. Homma. Improvement of Process Reproducibility and Particle Reduction for YF3 Coating by Collision Assisted Sintering Process in Reactive Ion Etching. 2020. 9. 6
○H. Koizumi, K. Ooshiro, K. Soeda, T. Homma. Effect of Drying Condition of Emitting Layer Formed by Ink-Jet Coating on Optical Property and Film Morphology of Polymer-Based Organic Light-Emitting Diodes. ECS J. Solid State Science and Technology. 2019. 8. 2. R36-R41
H. Koizumi, J. Watabe, S. Sugiyama, H. Hirabayashi, Y. Tokuno, H. Wada, T. Homma. Properties of Ce3+ doped Y3Al5O12 phosphor nanoparticles formed by laser ablation in liquid for LEDs. ECS Journal of Solid State Science and Technology. 2018. 7. 6. R63-R69