Imura Fumito

イムラフミト | Imura Fumito

Affiliation and department：
Homepage URL (1)： http://www.aist.go.jp/RESEARCHERDB/cgi-bin/worker_detail.cgi?call=namae&rw_id=F53826727

Research field (3)： Electronic devices and equipment , Nanobioscience , Nanomaterials

Research keywords (7)： 3次元構造体の微細加工技術 , 3次元形状計測 , アト-フェムトリットル微少液体制御 , ナノマニピュレーション , ナノプロービング , バンプ , 3次元実装

Research theme for competitive and other funds (1)：

MISC (3)：

Lectures and oral presentations (12)：

Micro-cone-shaped Au-bump by gas deposition method for high-density interconnection of LSI chips
(IMAPS/ACerS 4th International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT 2008) 2008)
Micro-cone-shaped Au-bump by gas deposition method for 3D-LSI stacking technology
(International 3D System Integration Conference 2008 (3D-SIC 2008) 2008)
ガスデポジション法による円錐バンプの作製-MEMSデバイスの低温・低荷重ストレスフリー実装を目指して-
(第18回マイクロエレクトロニクスシンポジウム(MES2008) 2008)
Extremely-Small and Blind Volume Control System toward the Atto-liter Liquid Operation
(Second International Symposium on Standard Material And Metrology for Nanotechnology 2006)
3D Lithography with Confocal Laser Scanning Microscope
(Second International Symposium on Standard Material And Metrology for Nanotechnology 2006)

ｍore...

Education (1)：

Professional career (1)：

Awards (2)：

Association Membership(s) (2)：

エレクトロニクス実装学会 , 電子情報通信学会

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