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J-GLOBAL ID：200901039915644009   Update date: Mar. 28, 2024

Arima Kenta

アリマ ケンタ | Arima Kenta
Affiliation and department：
Osaka University Nano Surface and Interface Engineering Area, Graduate School of Engineering

About Osaka University Nano Surface and Interface Engineering Area, Graduate School of Engineering


Job title： Professor
Homepage URL  (2)： http://www-sie.prec.eng.osaka-u.ac.jp/ ,  http://www-sie.prec.eng.osaka-u.ac.jp/index_E.html
Research field  (3)： Material fabrication and microstructure control ,  Manufacturing and production engineering ,  Thin-film surfaces and interfaces
Research keywords  (3)： Production engineering ,  semiconductor process ,  Surface Science
Research theme for competitive and other funds  (63)：
  • 2022 - 2026 Development of self-controlled wet-chemical nanomachining to shape and cleave Si crystals on the atomic-layer scale
  • 2021 - 2026 Realization of completely distortion-free processing by plasma nano-manufacturing process and exploration of its theory
  • 2022 - 2026 基盤研究(A)
  • 2021 - 2024 ナノカーボンが持つ腐食作用を逆手に取った異方的ナノ化学リソグラフィーへの挑戦
  • 2021 - 2024 挑戦的研究(萌芽)
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Papers (118)：
  • Junhuan Li, Kouji Inagaki, Kenta Arima. First-principles simulations of scanning tunneling microscopy images exhibiting anomalous dot patterns on armchair-edged graphene nanoribbons. PHYSICAL REVIEW RESEARCH. 2024. 6. 1. 013252-1-013252-9
  • Nian Liu, Kentaro Sugimoto, Naoya Yoshitaka, Hideaki Yamada, Rongyan Sun, Kenta Arima, Kazuya Yamamura. Highly efficient finishing of large-sized single crystal diamond substrates by combining nanosecond pulsed laser trimming and plasma-assisted polishing. Ceramics International. 2023. 49. 11. 19109-19123
  • Yuki Miyata, Yasunori Nakamukai, Cassia Tiemi Azevedo, Ayano Tsuchida, Miho Morita, Yasushi Oshikane, Junichi Uchikoshi, Kentaro Kawai, Kenta Arima, Mizuho Morita. Electroluminescence in metal-oxide-semiconductor tunnel diodes with a crystalline silicon/silicon dioxide quantum well. Micro and Nanostructures. 2022. 166. 207228-207228
  • Ayumi Ogasawara, Kentaro Kawai, Kazuya Yamamura, Kenta Arima. Nanocarbon-Induced Etching Property of Semiconductor Surfaces: Testing Nanocarbon’s Catalytic Activity for Oxygen Reduction Reaction at a Single-Sheet Level. ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY. 2022. 11. 4. 041001-1-041001-5
  • Nian Liu, Kentaro Sugimoto, Naoya Yoshitaka, Hideaki Yamada, Rongyan Sun, Kentaro Kawai, Kenta Arima, Kazuya Yamamura. Effects of polishing pressure and sliding speed on the material removal mechanism of single crystal diamond in plasma-assisted polishing. Diamond and Related Materials. 2022. 124. 108899-108899
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MISC (92)：
  • 有馬健太. 超精密な表面計測が拓く次世代ものづくり:ナノ表面界面工学の世界. TECHNO NET. 2023. 601. 4-5
  • Kenta ARIMA. Opening a New Laboratory Named Nano Surface and Interface Engineering Area. Manufacturing & Technology. 2023. 75. 3. 34-36
  • 陶通, 孫栄硯, 川合健太郎, 有馬健太, 山村和也. プラズマ援用研磨法の開発(第25報)-RS-SiC材のSiC成分とSi成分の酸化レートの評価-. 精密工学会大会学術講演会講演論文集. 2022. 2022
  • 孫栄硯, 陶通, 川合健太郎, 有馬健太, 山村和也. プラズマ援用研磨法の開発(第24報)-CF4プラズマ照射前後におけるAlN基板とダイヤモンド砥粒との吸着力の変化-. 精密工学会大会学術講演会講演論文集. 2022. 2022
  • 杉本健太郎, 孫栄硯, 川合健太郎, 有馬健太, 山村和也. プラズマ援用研磨による多結晶ダイヤモンド基板の高能率ダメージフリー 平坦・平滑化に関する研究(第1報). 砥粒加工学会学術講演会講演論文集(CD-ROM). 2022. 2022
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Books (7)：
  • 先端半導体製造プロセスの最新動向と微細化技術
    (株)技術情報協会 2023 ISBN:9784861049828
  • 半導体製造プロセスを支える洗浄・クリーン化・汚染制御技術
    サイエンス&テクノロジー(株) 2022 ISBN:9784864282949
  • 半導体製造におけるウェット/ドライエッチング技術
    (株)R&D支援センター 2022 ISBN:9784905507611
  • 2020版 薄膜作製応用ハンドブック
    (株)エヌ・ティー・エス 2020 ISBN:9784860436315
  • 超精密加工と表面科学 : 原子レベルの生産技術
    大阪大学出版会 2014 ISBN:9784872594652
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Education (3)：
  • 1997 - 2000 Osaka University Graduate School of Engineering Department of Precision Science and Technology
  • 1995 - 1997 Osaka University Graduate School of Engineering Department of Precision Science and Technology
  • 1991 - 1995 Osaka University School of Engineering Department of Precision Engineering
Professional career (2)：
  • Doctor of Engineering (Osaka University)
  • Doctor of Engineering (Osaka University)
Work history (6)：
  • 2023/04 - 現在 大阪大学 大学院 工学研究科 物理学系専攻 教授
  • 2009/04 - 2023/03 Osaka University Graduate School of Engineering Associate professor
  • 2007/04 - 2009/03 Osaka University Graduate School of Engineering Assistant professor
  • 2007/11 - 2008/10 Lawrence Berkeley National Laboratory Visiting Scholar
  • 2000/04 - 2007/03 Osaka University Graduate School of Engineering Research Associate
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Committee career (12)：
  • 2022/01 - 現在 応用物理学会 界面ナノ電子化学研究会 副委員長
  • 2018/07 - 現在 精密工学会 関西支部 幹事
  • 2010/04 - 現在 精密工学会 超精密加工専門委員会 幹事
  • 2019/01 - 2021/12 応用物理学会 界面ナノ電子化学研究会 コアメンバー
  • 2018/04 - 2019/03 日本表面真空学会 学術講演会委員会 委員
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Awards (25)：
  • 2023/11 - The Japan Society for Precision Engineering Best Presentation Award
  • 2023/06 - The Japan Society for Precision Engineering Best Presentation Award
  • 2022/09 - Professional Group of Interfacial Nano Electrochemistry, The Japan Society of Applied Physics Best Presentation Award
  • 2021/12 - The Japan Society for Precision Engineering Best Presentation Award
  • 2021/03 - Recognition by Dean of Graduate School of Engineering
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Association Membership(s) (5)：
The Electrochemical Society ,  Materials Research Society ,  The Japan Society of Vacuum and Surface Science ,  The Japan Society of Applied Physics ,  The Japan Society for Precision Engineering
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