Rchr
J-GLOBAL ID:200901040091752212   Update date: Sep. 27, 2024

Kanayama Toshihiko

カナヤマ トシヒコ | Kanayama Toshihiko
Affiliation and department:
Homepage URL  (1): http://www.aist.go.jp/RESEARCHERDB/cgi-bin/worker_detail.cgi?call=namae&rw_id=T28930003
Research field  (1): Electric/electronic material engineering
Research theme for competitive and other funds  (1):
  • 極微細半導体プロセス技術
Papers (133):
  • Naoya Okada, Noriyuki Uchida, Shinichi Ogawa, Toshihiko Kanayama. Amorphous Si-rich tungsten silicide with a low work function near the conduction band edge of Si. Applied Physics Express. 2020. 13. 6
  • Hitoshi Yamamura, Yuji Ohishi, Yukari Katsura, Kaoru Kimura, Noriyuki Uchida, Toshihiko Kanayama. Stability and bonding nature for icosahedral or planar cluster of hydrogenated boron or aluminum. AIP Advances. 2019. 9. 11. 115117-115117
  • Naoya Okada, Noriyuki Uchida, Shinichi Ogawa, Toshihiko Kanayama. Cluster-Preforming-Deposited Si-rich W Silicide: A new contact material for advanced CMOS. ECS Transactions. 2019. 89. 3. 155-164
  • Naoya Okada, Noriyuki Uchida, Shinichi Ogawa, Toshihiko Kanayama. Gas-phase reactions of WF6 with SiH4 for deposition of WSin films free from powder formation. Japanese Journal of Applied Physics. 2019. 58
  • Toshihiko Kanayama, Noriyuki Kawashima, Noriyuki Uchida. Initial growth kinetics of positive and negative hydrogenated Si cluster ions under the presence of silane radicals. Japanese Journal of Applied Physics. 2019. 58. 4
more...
MISC (108):
  • Yuji Ohishi, Yuji Ohishi, Kaoru Kimura, Masaaki Yamaguchi, Noriyuki Uchida, Toshihiko Kanayama. Ionization of decaborane with controlled hydrogen content by charge transfer from ambient gas. Materials Research Society Symposium Proceedings. 2011. 1307. 94-99
  • FUKUDA Koichi, NISHIZAWA Masayasu, TADA Tetsuya, BOLOTOV Leonid, SUZUKI Kaina, Sato Shigeo, ARIMOTO Hiroshi, KANAYAMA Toshihiko. Invited : Device Simulation of STM Carrier Profiling. Technical report of IEICE. SDM. 2011. 111. 281. 21-26
  • Yuji Ohishi, Yuji Ohishi, Kaoru Kimura, Masaaki Yamaguchi, Noriyuki Uchida, Toshihiko Kanayama. Synthesis and formation mechanism of hydrogenated boron clusters B12 Hnwith controlled hydrogen content. Journal of Chemical Physics. 2010. 133
  • Yuji Ohishi, Kaoru Kimura, Masaaki Yamaguchi, Noriyuki Uchida, Toshihiko Kanayama. Energy barrier of structure transition from icosahedral B 12H6+ to planar B12H 5+ and B12H4+ clusters. Journal of Physics: Conference Series. 2009. 176. 012030-012030
  • KANAYAMA Toshihiko, NISHIZAWA Masayasu, BOLOTOV Leonid. Two-dimensional impurity profiling by scanning tunneling microscopy. 2008. 77. 9. 1103-1106
more...
Education (2):
  • The University of Tokyo
  • The University of Tokyo Graduate School of Science
Professional career (1):
  • 工学博士
Work history (5):
  • 1993 - -産業技術融合領域研究所
  • 1993 - -National Institute for Advanced Interdisciplinary
  • 1977 - -電子技術総合研究所
  • 1977 - -Electrotechnical Laboratory
  • Research
Association Membership(s) (3):
日本表面真空学会 ,  日本物理学会 ,  応用物理学会
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