Rchr
J-GLOBAL ID:200901041160071920   Update date: Apr. 05, 2020

Ozaki Yoshiharu

オザキ ヨシハル | Ozaki Yoshiharu
Affiliation and department:
Research field  (2): Measurement engineering ,  Optical engineering and photonics
Research keywords  (1): Optical Instrumentation
Research theme for competitive and other funds  (3):
  • 1999 - 2002 Microscopic Observation of Phase Objects
  • 1999 - 2001 Visualization of Reactive Gas Flow
  • 1999 - Measurement of Degree of Spatial Coherence
MISC (10):
Patents (5):
  • Dry-etching System
  • Patterning Method
  • Cleaning Method of Through-hole in Semiconductor Devices
  • AN ELLIPTICAL LIGHT MEASURING METHOD (米国特許第5661560, 単著)
  • PHOTOMASK INSPECTING METHOD AND APPARATUS (米国特許第5548401, 単著)
Books (2):
  • Hecht OPTICS I
    Maruzen 2002
  • Systems Engineering and System Theory
    1998
Professional career (2):
  • Doctor of Engineering (Osaka Prefecture University)
  • Master of Engineering (Osaka Prefecture University)
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