Rchr

J-GLOBAL ID：200901042732508948 Update date: May. 17, 2020

Gonda Satoshi

ゴンダサトシ | Gonda Satoshi

Affiliation and department：
Homepage URL (1)： http://www.aist.go.jp/RESEARCHERDB/cgi-bin/worker_detail.cgi?call=namae&rw_id=S18746950
MISC (17)：

I. Misumi, S. Gonda, O. Sato, K. Sugawara, K. Yoshizaki, T. Kurosawa, T. Takatsuji. Nanometric lateral scale development using an atomic force microscope with directly traceable laser interferometers. MEASUREMENT SCIENCE AND TECHNOLOGY. 2006. 17. 7. 2041-2047
Interference effect in optical beam deflection detection system of dynamic AFMs and its influence on micro-profile measurement. MEASUREMENT SCIENCE & TEMHNOLOGY. 2006
QX Huang, S Gonda, Misumi, I, O Sato, T Keem, T Kurosawa. Nonlinear and hysteretic influence of piezoelectric actuators in AFMs on lateral dimension measurement. SENSORS AND ACTUATORS A-PHYSICAL. 2006. 125. 2. 590-596
Misumi, I, S Gonda, T Kurosawa, Y Azuma, T Fujimoto, Kojima, I, T Sakurai, T Ohmi, K Takamasu. Reliability of parameters of associated base straight line in step height samples: Uncertainty evaluation in step height measurements using nanometrological AFM. PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY. 2006. 30. 1. 13-22
Misumi, I, S Gonda, QX Huang, T Keem, T Kurosawa, A Fujii, N Hisata, T Yamagishi, H Fujimoto, K Enjoji, et al. Sub-hundred nanometre pitch measurements using an AFM with differential laser interferometers for designing usable lateral scales. MEASUREMENT SCIENCE AND TECHNOLOGY. 2005. 16. 10. 2080-2090

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