Ueno Kazuyoshi

ウエノカズヨシ | Ueno Kazuyoshi

Affiliation and department：

Research field (1)： Electric/electronic material engineering

Research keywords (2)：電子デバイス電子材料導電体電子物性 , electron devices electronic materials conductor solid state physics

Research theme for competitive and other funds (12)：

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Papers (109)：

Ryutaro Tsuchida, Kazuyoshi Ueno. Optimization for Current-Enhanced Solid-Phase Deposition of Multi-Layer Graphene with High Crystallinity and Uniformity. Materials Science Forum. 2023. 1108. 45-58
Takumi Nishimura, Masanobu Sato, Kazuyoshi Ueno. Adhesion improvement of multilayer graphene formed by solid phase deposition on SiO2 with Ti adhesion layer. Proceedings of Advanced Metallization Conference, Asian Session, 2023. 2023
Kouta Masukawa, Kazuyoshi Ueno. Novel pattern and improved CVD process for MLG / Ni hybrid patch antenna with high crystallinity and uniformity. Proceedings of Advanced Metallization Conference, Asian Session, 2023. 2023
Ploybussara Gomaasang, Masayoshi Umeno, Kazuyoshi Ueno. Moisture barrier properties of microwave plasma-enhanced CVD using greenhouse gases for Cu metallization. Proceedings of International Conference on Solid State Devices and Materials (SSDM) 2023. 2023
Ajay Kumar, Ramcharan Meena, M. Miryala, K. Ueno, Rajendra S. Dhaka. Effect of the growth orientation on the physical properties of Sr2CoNbO6 thin films. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 2023. 41. 5

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MISC (157)：

上野和良. Evolution and Recent Trends of BEOL Technology. 応用物理学会春季学術講演会講演予稿集(CD-ROM). 2023. 70th
増川紘太, 上野和良. Modification of Patch Antenna Patterns Using Multilayer Graphene/Nickel. 半導体・集積回路技術シンポジウム(CD-ROM). 2023. 87th
近藤奨紀, 亀山晃, 抱江柊利, 山崎康正, 岡田望, 澤田(佐藤)聡子, 小川英夫, 大西利和, 秦和弘, 砂田和良, et al. 86GHz帯常温受信機を搭載したVERA水沢局での試験観測と性能評価. 日本天文学会年会講演予稿集. 2023. 2023
亀山晃, 山崎康正, 近藤奨紀, 孫赫陽, 抱江柊利, 野曽原千晟, 澤田(佐藤)聡子, 岡田望, 小川英夫, 大西利和, et al. ブラックホール解明に向けた86GHz帯低雑音受信機の開発. 日本天文学会年会講演予稿集. 2023. 2023
冨田諒太郎, 布川朋也, 橋本啓佑, 塩崎啓登, 泉和良, 二宮郁, 堀克仁, 角陸文哉, 大豆本圭, 佐々木雄太郎, et al. 高齢者に対するロボット支援腹腔鏡下腎部分切除術の周術期成績-Propensity score matchingによる若年者との比較-. 腎癌研究会会報. 2023. 53

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Patents (27)：

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Books (31)：

先端半導体製造プロセスの最新動向と微細化技術
技術情報協会 2023 ISBN:9784861049828
半導体・MEMSのための超臨界流体
コロナ社 2012 ISBN:9784339008371
Grain Growth of Electroplated Copper Film by Alternative Annealing Methods(共著)
Conference Proceedings AMC XXIV 2009
Grain Growth of Electroplated Copper Film by Alternative Annealing Methods
Conference Proceedings AMC XXIV 2009
集積回路配線技術の動向と展望(基調講演)
日本機械学会関東支部第13期総合講演会講演論文集 2007

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Lectures and oral presentations (153)：

Evolution of BEOL Technology withScaling
(2023 International Conference on Electronics Packaging 2023)
窒素プラズマ処理をした銅表面の耐湿性
(電気化学会第90回大会 2023)
ニッケル薄膜抵抗の膜厚依存性と熱的安定性
(電気化学会第90回大会 2023)
BEOL技術の変遷と最近の動向
(2023年第70回応用物理学会春季学術講演会 2023)
電流を印加した多層グラフェンの層交換成長
(電気化学会第89回大会 2023)

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Works (6)：

Material and Process Challenges for Interconnects in Nanoelectronics Era (Invited)
2010 -
Chemical Vapor Deposition of Nanocarbon on Electroless Ni-B Allo Catalyst
2010 -
Material and Process Challenges for Interconnects in Nanoelectronics Era (Invited)
2010 -
Chemical Vapor Deposition of Nanocarbon on Electroless Ni-B Allo Catalyst
2010 -
Enhanced Grain Growth of Electroplated Copper Film by Annealing in Supercritical CO2 with H2
2009 -

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Education (2)：

1982 - 1984 Tohoku University Graduate School of Engineering Department of Applied Physics
1978 - 1982 Tohoku University Faculty of Engineering Department of Applied Physics

Professional career (1)：

Work history (5)：

2006/04 - 現在 Shibaura Institute of Technology Department of Electronic Engineering, College of Engineering Professor
2005 - 2006 NEC Electronics Chief Engineer
1996 - 2005 NEC / NEC Electronics Manager
1990 - 1996 NEC Corporation Microelectronics Research Laboratories Supervisor
1984 - 1990 NEC Corporation

Committee career (7)：

2021/04 - 2023/03 電気化学会電子材料委員会委員長
2020/09 - 2021/08 IEEE International Interconnect Technology Conference 2021 (IITC2021) General Chair
2013/04 - 2014/04 Japan Electronics and Information Industries Association (JEITA) Semiconductor Technology Roadmap Committee, WG4 Leader
2010/10 - 2011/10 Advanced Metallization Conference, Asian Session 2011 (ADMETA Plus 2011) General Chair
2008 - 2010 電気学会電子デバイス技術委員会委員長

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Awards (2)：

Association Membership(s) (5)：

Institute of Electrical and Electronics Engineers , 電気学会 , 応用物理学会 , 電子情報通信学会 , 電気化学会

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