Rchr
J-GLOBAL ID：200901048098623281   Update date: Oct. 15, 2024

Kato Shigeo

カトウ シゲオ | Kato Shigeo
Homepage URL  (1)： http://leo.nit.ac.jp/~kato
Research field  (1)： Mechanics and mechatronics
Research keywords  (6)： メカトロニクス ,  ロボット工学 ,  動的解析 ,  MECHATRONICS ,  ROBOTICS ,  dynamics analysis
Research theme for competitive and other funds  (8)：
  • 1996 - 管内自走検査ロボット
  • 1996 - IN-PIPE MOBILE INSPECTION ROBOT
  • 1995 - 気液相変化マイクロアクチュエータ
  • 1995 - GAS-LIQUID PHASE-CHANGE MICRO ACTUATOR
  • 気液相変化アクチュエータの研究
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MISC (112)：
ｍore...
Books (5)：
  • Fabrication and Simulation of a Gas-Liquid Phase-change Micro-acuator.
    Proceedings of the 3rd France-Japan Congress and 1st Europe-Asia Congress on Mechatrouics. 1996
  • Fabrication and Thermal Analysis of a Gas-liquid Phase-change Micro-actuator.
    Micro System Technologies 96. 1996
  • Analytical Expression of the Damping Ratio of Air-lubricated Slideways.
    Proceedings of the 3rd International Conference of Motion and Vibration control. 1996
  • Theoretickal Analysis of Step Response Characteristics of Air-lubricated Sldewqys for Ultra Pvecision Surface Grinders
    International Progress in Precision Engineering(Elsevier社) 1995
  • Chip yield for FETs-fabricated on low-surface-defect GaAs wafers Grown by a new MBE system
    Applications of Surface Science and Electronic Materials 1993
Works (15)：
  • 1MV大型電子顕微鏡のホログラフィ化の検討
    1993 -
  • 1MV大型電子顕微鏡の振動モデル
    1993 -
  • Simulation of Vibration in a Large-scale Electron Microscope
    1993 -
  • A Wafer Cooling Stage for Low Temperature Dry Etching
    1992 -
  • ダイヤモンド切削面と回折光の関係
    1986 -
ｍore...
Education (6)：
  • - 1965 東京工業大学大学院 理工学研究科 機械工学
  • - 1965 Tokyo Institute of Technology
  • - 1965 TOKYO INSTITUTE OF TECHNOLOGY, POST GRADUATE SCHOOL POSTGRADUATE COURSE OF SCIENCE AND ENGINEERING MECHANICAL ENGINEERING
  • - 1965 Tokyo Institute of Technology Graduate School, Division of Engineering MECHANICAL ENGINEERING
  • - 1963 Tokyo Institute of Technology
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Professional career (3)：
  • (BLANK)
  • DOCTOR OF ENGINEERING (Tokyo Institute of Technology)
  • 工学博士 (東京工業大学)
Awards (5)：
  • 1987 - 発明協会全国発明表彰発明賞
  • 1984 - 精機学会(現・精密工学会)技術賞
  • 1982 - 工作機械技術振興財団論文賞
  • 1980 - 機械振興協会賞
  • 1977 - 日刊工業新聞社十大新製品賞
Association Membership(s) (8)：
日本ロボット学会 ,  日本機械学会 ,  アメリカ精密工学会(ASPE) ,  精密工学会 ,  ROBOTICS SOCIETY OF JAPAN ,  JAPAN SOCIETY OF MECHANICAL ENGINEERS ,  JAPAN SOCIETY FOR PRECISION ENGINEERING ,  AMERICAN SOCIETY FOR PRECISION ENGINEERING
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