Rchr
J-GLOBAL ID:200901049886380922   Update date: Aug. 28, 2020

Uchida Yasutaka

ウチダ ヤスタカ | Uchida Yasutaka
Affiliation and department:
Job title: Professor
Research field  (2): Electronic devices and equipment ,  Semiconductors, optical and atomic physics
Research keywords  (9): 電子材料(誘電体) ,  LSI ,  太陽電池 ,  薄膜トランジスタ ,  Si/Geヘテロ界面 ,  Low-K Insulating Films ,  LSI ,  Thin film devices ,  CIGS Solar cell
Research theme for competitive and other funds  (6):
  • 2008 - CIGS太陽電池
  • 2008 - CIGS太陽電池
  • 1995 - 低誘電率絶縁膜の研究
  • 1980 - 薄膜デバイスの研究
  • 1980 - Study on thin film devices
Show all
MISC (41):
Patents (6):
  • シリコン系絶縁膜の製造方法
  • シリコン系絶縁膜の製造方法
  • 太陽電池用多結晶薄膜の製造方法
  • 気相からの低誘電率多孔質シリカ膜の形成法
  • 気孔を有する反射防止膜とその製法
more...
Lectures and oral presentations  (2):
  • Porogen concentration dependence of the pore-size distribution in low-k porous silica films with C2H4 groups
    (ADMETA2007 2007)
  • Invesitgation of pulsed-laser annealing of CIGS films
    (PVSEC-17 2007)
Education (2):
  • - 1980 Aoyama Gakuin University
  • - 1980 Aoyama Gakuin University
Professional career (1):
  • (BLANK) (Tokyo Institute of Technology)
Work history (4):
  • 1987 - 1990 Takushoku University
  • 1987 - 1990 Takushoku University, Research Associate
  • 1980 - 1987 Tokyo Institute of Technology
  • 1980 - 1987 Tokyo Institute of Technology, Research Associate
Committee career (2):
  • 2009 - ADMETA2009,2008,2007論文委員
  • 応用物理学会シリコンテクノロジー分科会委員
Association Membership(s) (1):
応用物理学会
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