Rchr
J-GLOBAL ID：200901059759257262
Update date: Jun. 01, 2020
Kuroda Ekyou
クロダ エキョウ | Kuroda Ekyou
Affiliation and department：
Nagoya College of Music The Faculty of Music
About Nagoya College of Music The Faculty of Music
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Detailed information
Research field (4)：
Inorganic materials
, Electronic devices and equipment
, Crystal engineering
, Applied materials
Research keywords (7)：
無機材料・物性
, 電子デバイス
, 結晶工学
, 応用物性
, Inorganic Material
, Electron Device
, Crystal Technology
Research theme for competitive and other funds (4)：
1985 - シリコンエピタキシーの低温化
1985 - 半導体プロセスの研究
Low Temperature of Silion Epitaxy
Study on Silicon Semiconductor Processes
MISC (38)：
バレル型成長炉におけるジフルオロシランを用いた選択エピタキシャルシリコン成長. 名古屋音楽大学研究紀要. 1999. 18. 15
Selective Epitaxial Silicon From SiH
2
F
2
in a Barrel Reactor. NAGOYA COLLEGE OF MUSIC. 1999. 18. 15
シリコンエピタキシャルの研究. 豊田工業大学電子テバイス10年の歩み. 1993. 62
Study on Silicon Epitaxial. 1993. 62
S NAGIRA, A HATANO, M TAKEUCHI, E KURODA, M MIGITAKA. LOW-TEMPERATURE SILICON THERMAL CVD EPITAXY USING DICHLOROSILANE AND DIFLUOROSILANE AS REACTANT GAS. JOURNAL OF CRYSTAL GROWTH. 1990. 106. 4. 719-723
ｍore...
Works (1)：
高品位半導体エピタキシャル成長技術の研究
1991 -
Education (4)：
- 1968 Nagoya University
- 1968 Nagoya University Graduate School, Division of Natural Science
- 1966 Nagoya University School of Science
- 1966 Nagoya University Faculty of Science
Professional career (2)：
(BLANK)
(BLANK)
Association Membership(s) (3)：
日本結晶成長学会
, 日本化学会
, 応用物理学会
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