Rchr
J-GLOBAL ID:200901063620583243
Update date: Feb. 23, 2011
Kazawa Elito
カザワ エリト | Kazawa Elito
Affiliation and department:
Tokyo Metropolitan Industrial Technology Research Institute
About Tokyo Metropolitan Industrial Technology Research Institute
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Job title:
Chief Researcher
Research field (2):
Nano/micro-systems
, Nanomaterials
Research keywords (2):
MEMS リソグラフィ HARMS UV-LIGA SPR LSPR シリコン異方性エッチング
, MEMS Lithograph HARMS SPR LSPR
Research theme for competitive and other funds (2):
2006 - 2011 VOC計測技術
2006 - 2011 VOC mesurement techniques
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