J-GLOBAL ID:200901063620583243   Update date: Feb. 23, 2011

Kazawa Elito

カザワ エリト | Kazawa Elito
Affiliation and department:
Job title: Chief Researcher
Research field  (2): Nano/micro-systems ,  Nanomaterials
Research keywords  (2): MEMS リソグラフィ HARMS UV-LIGA SPR LSPR シリコン異方性エッチング ,  MEMS Lithograph HARMS SPR LSPR
Research theme for competitive and other funds  (2):
  • 2006 - 2011 VOC計測技術
  • 2006 - 2011 VOC mesurement techniques
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