Low Low energy Ar+ ion beam machining of ULE® and CLEARCERAM® substrates for TMT primary mirrors
(The 54th international conference on electron, ion, and photon beam technology and nanofabrication.(EIPBN-2010) 2010)
Facet and ripple formations on single crystal diamond tools machined by low energy Oxygen ion beam
(The 21st European Conference on Diamond, Diamond- Like Materials, Carbon Nanotubes, and Nitrides (Diamond-2010) 2010)
Roughening and smoothing behavior of single crystal Si by low energy Ar+ ion bombardment
(The 17th International Conference on Ion Beam Modification of Materials (IBMM-2010) 2010)
3-10 keV Xe+ ion beam machining of ultra low thermal expansion glasses for EUVL projection optics: Evaluation of surface roughness
(IBMM (Ion Beam Modification of Materials) 2010 2010)
Low Low energy Ar+ ion beam machining of ULE® and CLEARCERAM® substrates for TMT primary mirrors
(The 54th international conference on electron, ion, and photon beam technology and nanofabrication.(EIPBN-2010) 2010)
