Yonekubo So

ヨネクボソウ | Yonekubo So

Affiliation and department：
Job title： Researcher

Research field (1)： Thin-film surfaces and interfaces

Research keywords (8)： XPS , センサ , MEMS , 薄膜 , XPS , Sensor , MEMS , Thin film

Research theme for competitive and other funds (4)：

2002 - 2007 X線光電子分光法の高度化
2002 - 2007 MEMSの開発ー物理量センサー
2002 - 2007 XPS
2002 - 2007 MEMS

MISC (8)：

接触式ラインセンサ. 電学論C(1992), Vol.112-C
四塩化ケイ素を用いたプラズマCVD法によるSiC薄膜の形成. 電学論A(1995), Vol.115-A
Thermoelectric power of polycrystalline Si films prepared by microwave plasma chemical vapour deposition. Thin Solid Films(1996), 281-282
Resistance-Temperature Characteristics of Polycrystalline Diamond/Silicon water Structure. Sensors and Materiale(1999),vol.11
Thermoelectric power of polycrystalline Si films prepared by microwave plasma chemical vapour deposition. Thin Solid Films(1996), 281-282

ｍore...

Professional career (1)：

Dr.Eng.

Association Membership(s) (6)：

日本表面科学会 , 電気学会 , 応用物理学会 , The Surface Science Society of Japan , The Japan Society of Applied Physics , The Institute of Electrical Engineers of Japan

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