Research keywords (1):
Micro-Electro-Mechanical Sysytem (MEMS), piezoelectric material, PZT thin film, PZT ceramics, piezoelectric actuator, micro sensor, ultrasonic transducer, micro pump, PZT-Si bonding,ultrasonic sensor, ultrasonic probe,slope failure
The Japanese Society for Non-destructive Inspection
, The Japanese Geotechnical Society
, The Vacuum Society of Japan
, The Ceramic Society of Japan
, "The Institute of Electronics, Information and Communication Engineers (IEICE)"
, "The Society of Materials Science, Japan"
, The Institute of Electrical Engineers of Japan
, The Society of Sensing Technology of Japan
, The Japan Society of Applied Physics
, New Inorganic Film Research Society