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J-GLOBAL ID：200901074234127570   Update date: Jan. 30, 2024

Inoue Shozo

イノウエ シヨウゾウ | Inoue Shozo
Affiliation and department：
University of Hyogo Graduate Schoolof Engineering

About University of Hyogo Graduate Schoolof Engineering


Research field  (1)： Material fabrication and microstructure control
Research keywords  (2)： sputtering ,  Thin Film
Research theme for competitive and other funds  (15)：
  • 2019 - 2023 相変態を利用した2次元応力分布記録メディアとしてのステンレス薄膜
  • 2015 - 2017 発熱特性を制御できる金属-酸化物多層自己伝播発熱材料の開発
  • 2011 - 2013 MEMS構造材料への展開を目指したバルク金属ガラス薄膜の材料探索
  • 2008 - 2010 高速応答形状記憶合金マイクロアクチュエータ材料の開発とそのマイクロ加工技術の確立
  • 2002 - 2004 強磁性形状記憶合金薄膜による磁場動作型マイクロアクチュエーターの開発
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Papers (193)：
  • Shozo Inoue, Naoto Morikawa, Akira Heya, Takahiro Namazu. Deposition of W-C films by dual source dc magnetron sputtering. Proceedings of 19th International Conference on Precision Engineering (ICPE2022, Nara). 2022. C132
  • 森川直人, 分銅亮介, 部家彰, 生津資大, 井上尚三. 二源スパッタリング法によるW-C薄膜の作製. 2022年度精密工学会秋季大会学術講演会講演論文集. 2022. 221-222
  • 朝田昂大, 大路利菜, 井上尚三. SUS304ステンレス鋼スパッタ薄膜のCu薄膜上での成長相と成長形態. 2022年度精密工学会秋季大会学術講演会講演論文集. 2022. 219-220
  • S. Kammachi, Y. Goshima, N. Goami, N. Yamashita, S. Kakinuma, K. Nishikata, N. Naka, S. Inoue, T. Namazu. Cathodoluminescence Spectroscopic Stress Analysis for Silicon Oxide Film and Its Damage Evaluation. Materials. 2020. 13. 4490-8 pages
  • Shozo Inoue, Yu Fujiwara, Najami Zahira, Naoki Umada. Effect of deposition condition on the crystal phase of 18-8 stainless steel films prepared by dc magnetron sputtering. Proceedings of the 15th International Symposium on Sputtering and Plasma Processes (ISSP2019). 2019. 188-190
ｍore...
MISC (72)：
  • FUJII Tatsuya, INA Ginnosuke, INOUE Shozo, NAMAZU Takahiro. OS1420-430 In-Situ SEM Tensile Testing of Sacrificial Oxidized Si Nanowires Using Electrostatic Actuated MEMS Device. 2015. 2015. "OS1420-430-1"-"OS1420-430-2"
  • KOZEKI Takahiro, FUJII Tatsuya, INOUE Shozo, NAMAZU Takahiro. OS1419-420 Fabrication of Si nanowires using focused ion beam masking technique and their mechanical property evaluation. 2015. 2015. "OS1419-420-1"-"OS1419-420-2"
  • Kozeki Takahiro, Phan Hoang-Phuong, Dao Dzung Viet, Inoue Shozo, Namazu Takahiro. 29pm2-F-3 Piezoresistive effect of p-type silicon nanowires fabricated by a top-down process using FIB implantation and wet etching. 2015. 2015. 7. "29pm2-F-3-1"-"29pm2-F-3-2"
  • INOUE Keita, KANETUKI Shunsuke, MIYAKE Shugo, INOUE Shozo, NAMAZU Takahiro. J2210206 Comparison of heat performance characteristics in sputtered Ti/SiO multilayer films with those in Ti/Si multilayer films. Mechanical Engineering Congress, Japan. 2015. 2015. "J2210206-1"-"J2210206-3"
  • KIYOHARA Keita, INOUE Keita, INOUE Shozo, NAMADU Takahiro. J2210102 Fabrication of porous silica nanoparticles with various pore-sizes and porosities and their strength evaluation. Mechanical Engineering Congress, Japan. 2015. 2015. "J2210102-1"-"J2210102-5"
ｍore...
Education (3)：
  • 1984 - 1987 Osaka University
  • 1982 - 1984 Osaka University
  • 1978 - 1982 Osaka University School of Engineering
Professional career (1)：
  • (BLANK) (Osaka University)
Work history (6)：
  • 2004/04 - 現在 University of Hyogo
  • 2003/10 - 2004/03 Himeji Institute of Technology
  • 1998/04 - 2003/09 Himeji Institute of Technology
  • 1996/10 - 1998/03 Himeji Institute of Technology
  • 1987/04 - 1996/09 Himeji Institute of Technology
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Committee career (3)：
  • 2020 - 現在 精密工学会関西支部 商議員
  • 2012 - 現在 精密工学会 超精密加工専門委員会幹事
  • 2009 - 現在 精密工学会 校閲協力委員
Association Membership(s) (4)：
精密工学会 ,  American Vacuum Society ,  応用物理学会 ,  日本金属学会
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