Rchr
J-GLOBAL ID:200901075666063935
Update date: Sep. 02, 2022
Arai Toshihiko
アライ トシヒコ | Arai Toshihiko
Affiliation and department:
Research field (4):
Electronic devices and equipment
, Electrical power engineering
, Basic plasma science
, Applied plasma science
Research keywords (4):
プラズマ診断
, プラズマプロセス
, Plasma Diagnostics
, Plasma Process
Research theme for competitive and other funds (12):
- 2004 - 液晶バックライト用電極材料としてのダイヤモンド薄膜
- 2004 - Diamond Films for Electrode Material Used LCD Back-Lighting
- 平面型蛍光ランプ
- 容量結合型プラズマを用いたダイヤモンドエッチング
- 白色光レ-ザ-に関する研究
- 低圧水銀ランプ放電中の励起機構
- 半導体プロセス用プラズマ中のラジカル計測
- Flat Fluorescent Lamp
- Diamond Etching by Capacitively Coupled Plasma
- Study on White Light Laser
- Excitation Mechanism in Low-Pressure Ar-Hg Discharges
- Radical Measurements on Plasmas Used for Semiconductor Processing
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MISC (47):
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T Misu, M Goto, T Arai. Reactive ion etching of CVD diamond thin films in O-2/CF4 plasma. CZECHOSLOVAK JOURNAL OF PHYSICS. 2004. 54. SC. C1011-C1015
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Reactive Ion etching of Diamond Films Using O2/CF4 Plasma with Narrow Electrode Gap. Proceedings of 26th International on Phenomena in Ionized Gases, Greifswald, Germany. 2003. 137-138
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Measurements of Hg Particle densities and Electron Temperature in Ar-Hg Discharge Plasma Under on Increased Pressure Ar and in Narrow Tube. Proceedings of 25th International Conference on Phenomena in Ionized Gases, Nagoya, Japan. 2001. 263-264
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Etching of Diamond Films by Reactive Ion Etching in O2/CF4 Plasma. Proceedings of 25th International Conference on Phenomena in Ionized Gases, Nagoya, Japan. 2001. 143-144
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Influence of Wall Heating on Surface Loss Probability for CF2 Radical in CF4 Hollow Cathode Discharge Plasma. Proceedings of 15th International Symposium on Plasma Chemistry, Orleans, France. 2001. 1263-1266
more...
Books (4):
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レ-ザ-フォトニクス
共立出版 1993
-
Laser-Photonics
1993
-
基礎電気電子回路
オ-ム社 1990
-
Basic electric and electronic circuits
1990
Education (4):
- - 1979 Meiji University
- - 1979 Meiji University Graduate School, Division of Engineering
- - 1967 Meiji University
- - 1967 Meiji University Faculty of Engineering
Professional career (2):
- Master of Engineering (Meiji University)
- Doctor of Engineering (Meiji University)
Work history (2):
- 1978 - 1982 Meiji University
- 1978 - 1982 Meiji University, Research Assistant
Committee career (1):
Association Membership(s) (3):
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