Research theme for competitive and other funds (31)：
2001 - 現在 -
2001 - 現在 -
2001 - 現在 -
2005 - 2006 The figure measurement simulation for the semiconductor trench by wavelet analysis with interference spectrum data.
2004 - 2005 The figure measurement simulation for the semiconductor trench by wavelet analysis with interference spectrum data.
2004 - 2005 The figure measurement simulation for the semiconductor trench by wavelet analysis with interference spectrum data.
2004 - 2005 The figure measurement simulation for the semiconductor trench by wavelet analysis with interference spectrum data.
2004 - 2005 -
2003 - 2004 The figure measurement simulation for the semiconductor trench by wavelet analysis with interference spectrum data.
2003 - 2004 The figure measurement simulation for the semiconductor trench by wavelet analysis with interference spectrum data.
2003 - 2004 The study of the analysis methods for the optical properties of the micropatterns using the FDTD method.
2003 - 2004 What is the IT revolution? -The role and activity fields of engineers.
2002 - 2003 The figure measurement simulation for the semiconductor trench by wavelet analysis with interference spectrum data.
2002 - 2003 What is the IT revolution? -The role and activity fields of engineers.
2002 - 2003 The study of the characteristics of the micropatterns.
2001 - 2003 -
2002 - 2002 The figure measurement simulation for the semiconductor trench by wavelet analysis with interference spectrum data.
2002 - 2002 The assist of the overseas voyage traveling expenses.
2001 - 2002 The figure measurement simulation for the semiconductor trench by wavelet analysis with interference spectrum data.
2001 - 2002 What is the IT revolution? -The Role and activity fields of the engineer.-
2001 - 2002 -
1999 - 2000 The figure measurement simulation for the semiconductor trench by wavelet analysis with interference spectrum data.
1999 - 1999 The assist of the overseas voyage traveling expenses.
Study on transmission modal noise in optical fiber.
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Study on optical measurement of shapes of semiconductor trenchesby wavelet prosessing.
Scatterometry analysis by RCWA methods
Study on microwave circuits and radiators
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Papers (207)：
Hirokimi Shirasaki. -. 2016. 9778. 69
Hirokimi Shirasaki. -. 2015. 9424. 70
Hirokimi Shirasaki. 3D Isolation Mounts Scatterometry with RCWA and PML. METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXIX. 2015. 9424. 9424211-9424217
Arbitrary 3D linewidth forms measurement simulations for the next-generation semiconductor circuits by scatterometry using the FDTD method
SPIE's 18th annual symposium on microlithography 2004
Linewidth measurement simulations for semiconductor circuits by scatterometry using the FDTD and the time shortening calculation method
SPIE's 18th annual symposium on microlithography 2004
Resist and Silicon Trench Array Linewidth Measurement Simulations for the Next-Generation Semiconductor Circuits by Optical Scattering Properties Using the FDTD Method
"Metrology, Inspection, and Process Control for Microlithography XVII", Proceedings of SPIE 2003
Recent reserch developments in electronics & communications.(Co-author)
Transworld research network 2003
1970 - 1974 Osaka University Faculty of Engineering Science Electrical Engineering
Work history (7)：
1999/04/01 - 現在 Tamagawa Academy Professor
1990/04/01 - 1999/03/31 Tamagawa Academy Associate professor
1982/04/01 - 1990/03/31 Tamagawa Academy Lecturer
1979/04/01 - 1982/03/31 Tamagawa Academy Lecturer
1977/04/01 - 1982/03/31 Tamagawa Academy Lecturer
1979/04/01 - 1980/03/31 Tamagawa Academy Resercher
Tamagawa University College of Engineering, Department of Intelligent Mechanical Systems Adjunct Lecturer
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Association Membership(s) (6)：
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, Opticl Society of America
, The International Society for Optical Engineering (SPIE)
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, The Institute of Electrical and Electronics Engineers.(IEEE)
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